Patents by Inventor Ian R. KRUMANOCKER

Ian R. KRUMANOCKER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overlay optimization
    Patent number: 11036912
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to overlay optimization and methods of manufacture. The method includes performing, by a computing device, an exposure with a correction parameter to a first wafer; performing, by the computing device, a decorrection of the correction parameter; collecting, by the computing device, overlay data in response to the exposure and the decorrection; estimating, by the computing device, an optimal parameter from the overlay data; and applying, by the computing device, the optimal parameter to a second wafer to align an overlay in the second wafer.
    Type: Grant
    Filed: November 11, 2019
    Date of Patent: June 15, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Richard P. Good, Ian R. Krumanocker
  • OVERLAY OPTIMIZATION
    Publication number: 20210141303
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to overlay optimization and methods of manufacture. The method includes performing, by a computing device, an exposure with a correction parameter to a first wafer; performing, by the computing device, a decorrection of the correction parameter; collecting, by the computing device, overlay data in response to the exposure and the decorrection; estimating, by the computing device, an optimal parameter from the overlay data; and applying, by the computing device, the optimal parameter to a second wafer to align an overlay in the second wafer.
    Type: Application
    Filed: November 11, 2019
    Publication date: May 13, 2021
    Inventors: Richard P. GOOD, Ian R. KRUMANOCKER