Abstract: A method and system that optionally allows a user to view image defects organized by natural groupings based on features of the images. The natural groupings make it easier for the user to organize some or all of the images into classes in a training set of images. A feature vector is extracted from each image in the training set and stored, along with its user-specified class, for use by an automatic classifier software module. The automatic classifier uses the stored feature vectors and classes to automatically classify images not in the training set. If the automatically classified images do not match images manually classified by the user, the user modifies the training set until a better result is obtained from the automatic classifier. The system can provide feedback to an inspection system designed to aid in the setup and fine-tuning of the inspection system.

Abstract: An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

Abstract: An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

Abstract: An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

Abstract: An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

Abstract: An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

Abstract: An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

Abstract: An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

Abstract: A method for electrohydrodynamic printing wherein multiple colors are printed by discharging the receiving medium by reverse-sign corona discharge, then charging the receiving medium by corona discharge, and then printing the first color. The receiving medium is then discharged, and charged a second time by corona discharge. The process is repeated for each color used in the printing. As a result, the colors are printed in their intended locations without deflection even if the intended location is a dot of previously deposited color.

Abstract: An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

Abstract: A large scale horizontal translation stage for a microscope or other instrument particularly a scanning probe microscope is disclosed. The translation stage is provided with air bearings which allow it to float over a planar surface. The translation stage is kinematically mounted on a guiding member such that the horizontal position of the translation stage is defined by the guiding member but the translation stage is free to move in a direction perpendicular to the planar surface. To position a sample, the air bearings are actuated and the guiding member moves the translation stage to a desired position. An attractive force, preferably suction in the air bearings, is then applied to hold the translation stage firmly against the supporting surface while the sample is analyzed. The preferred embodiment includes two optical microscopes.

Abstract: A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe.

Abstract: An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

Abstract: A cantilever for a scanning probe microscope is disclosed. The cantilever includes a piezoresistor for detecting the deflection of the cantilever, and a tip which is formed integrally with the cantilever. A process of fabricating such a cantilever is also disclosed, the process yielding a tip which has a high aspect ratio and a small radius of curvature at its apex. A combined atomic force/lateral force microscope including two or more piezoresistors responsive to both the bending and torsion of the cantilever is also disclosed.

Abstract: A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe.

Abstract: A system for inspecting and measuring the dimensions of patterned features on lithographic photomasks includes a confocal scanning microscope beneath which is mounted the photomask to be inspected. The photomask is moved to permit the imaging beam from the microscope to record reflectivity information at closely spaced points along a scan line at the metal-substrate interface within the photomask, and the unpatterned side of the mask is positioned facing the microscope so that the imaging beam passes through the transparent substrate material of the mask to the desired measurement plane. An objective lens specially corrected for imaging through transparent materials is used in the optical system, and compensating glass plates may be selectively placed between the objective lens and the photomask when the substrate of the mask is thinner than the thickness of transparent material for which the objective lens was corrected.

Abstract: This invention relates to aminoalkylphenoxyalkyl substituted heterocycles. These compounds antagonize the action of histamine on histamine H.sub.2 -receptors in the brain. A compound of the invention is 2-[3-[3-(piperidinomethyl)phenoxy]propylamino]benzthiazole.

Abstract: A scanning confocal optical imaging system is utilized to read or measure data magnetically recorded on a magneto-optic disk. The system includes a laser for producing a linearly polarized beam and a beam splitter for directing the transmitted beam to the disk and for deflecting a portion of the reflected return beam from the disk to a photodetector. A pinhole plate is placed between the beam splitter and the disk for restricting the size of the transmitted and reflected beams, and a polarizer is positioned between the beam splitter and the photodetector to receive the deflected return beam and provide an output that discriminates between the differing directions of rotation of the polarization plane of the transmitted beam by the magnetized area on the disk so that the direction of magnetization of the magnetized area can be read by the photodetector.

Abstract: A system for determining surface profiles of specimens such as semiconductor wafers includes a drive for mounting the wafer for oscillatory movement along a line and an optical imaging system overlying the wafer for focusing a beam on a small sport on the wafer and including a photodetector for detecting the reflected sport from the wafer. The spot is scanned along the line on the wafer while the focal depth of the imaging system is progressively changed while the photodetector and connected digital circuitry generate a plurality of spaced output signals for each scan along the line so that data comprised of a series of spaced signals are provided at a plurality of focus levels extending through the surface profile of the wafer. Computer means are provided for analyzing the data and providing a graphical output of the surface profile.

Abstract: A confocal optical imaging system includes a laser for producing a linearly polarized beam which is transmitted through the optical elements of the system, focused on a small spot on the target, and reflected back through the optical elements to a photodetector where the reflectance from the spot is determined. The optical elements include a pinhole plate for restricting the size of the transmitted and reflected beams which plate, along with other of the optical elements, can produce unwanted reflections adding optical noise to the reflected beam from the target. A retardation plate between the pinhole plate and the target alters the polarization of the transmitted beam relative to the reflected beam so that a polarizer will discriminate between the true reflected beam signal and the unwanted reflections to thereby improve the signal-to-noise ratio at the photodete ctor.