Abstract: A charged particle analyzer (1) comprises a first non-imaging electrostatic lens (8, 9) for receiving charged particles having divergent, trajectories and for converting the said trajectories into substantially parallel trajectories. At least one planar filter (10) is provided for receiving the charged particles having the substantially parallel trajectories and for filtering the charged particles in accordance with their respective energies. A second non-imaging electrostatic lens (11) receives the energy filtered charged particles and selectively modifies their trajectories as a function of their energies. A charged particle detector (12) then receives the charged particles in accordance with their selectively modified trajectories.

Abstract: A method and apparatus for quantitative analysis of a material in which an electron beam is caused to impinge upon the material are described. The method comprises detecting low loss electrons (LLEs) received from a first region of the material due to interaction with the electron beam and generating corresponding LLE data. The method further comprises detecting x-rays received from a second region of the material due to interaction with the electron beam and generating corresponding x-ray data, wherein the first and second regions overlap, and analysing the LLE data together with the x-ray data so as to generate compositional data representative of the composition of the first region.

Abstract: A method and apparatus for quantitative analysis of a material in which an electron beam is caused to impinge upon the material are described. The method comprises detecting low loss electrons (LLEs) received from a first region of the material due to interaction with the electron beam and generating corresponding LLE data. The method further comprises detecting x-rays received from a second region of the material due to interaction with the electron beam and generating corresponding x-ray data, wherein the first and second regions overlap, and analysing the LLE data together with the x-ray data so as to generate compositional data representative of the composition of the first region.

Abstract: A charged particle analyser (1) comprises a first non-imaging electrostatic lens (8, 9) for receiving charged particles having divergent, trajectories and for converting the said trajectories into substantially parallel trajectories. At least one planar filter (10) is provided for receiving the charged particles having the substantially parallel trajectories and for filtering the charged particles in accordance with their respective energies. A second non-imaging electrostatic lens (11) receives the energy filtered charged particles and selectively modifies their trajectories as a function of their energies. A charged particle detector (12) then receives the charged particles in accordance with their selectively modified trajectories.

Abstract: A sample inspection apparatus comprises a sample support; a detection system for detecting radiation emitted by or transmitted through a sample on the sample support in response to radiation incident on the sample; and a cooling system for cooling at least one of the sample support and detection system. The cooling system includes at least one oscillating, mechanical component which oscillates at a frequency different from the at least one of the support and detection system.