Patents by Inventor Ian Roger Oliver

Ian Roger Oliver has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUV light source
    Patent number: 7164144
    Abstract: A laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprises a target delivery system adapted to deliver moving plasma initiation targets and an EUV light collection optic having a focus defining a desired plasma initiation site, a target tracking and feedback system comprising: at least one imaging device providing as an output an image of a target stream track, and a stream track error detector detecting an error in the position of the target stream track in at least one axis generally perpendicular to the target stream track from a desired stream track intersecting the desired plasma initiation site.
    Type: Grant
    Filed: July 27, 2004
    Date of Patent: January 16, 2007
    Assignee: Cymer Inc.
    Inventors: William N. Partlo, Norbert Bowering, Alexander I. Ershov, Igor V. Fomenkov, David W. Myers, Ian Roger Oliver, John Viatella, Robert N. Jacques