Patents by Inventor Ian Ronald Johnston

Ian Ronald Johnston has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for etching a substrate
    Patent number: 6187685
    Abstract: There is disclosed a method and apparatus for etching a substrate. The method comprises the steps of etching a substrate or alternately etching and depositing a passivation layer. A bias frequency, which may be pulsed, may be applied to the substrate and may be at or below the ion plasma frequency.
    Type: Grant
    Filed: February 8, 1999
    Date of Patent: February 13, 2001
    Assignee: Surface Technology Systems Limited
    Inventors: Janet Hopkins, Ian Ronald Johnston, Jyoti Kiron Bhardwaj, Huma Ashraf, Alan Michael Hynes, Leslie Michael Lea