Patents by Inventor Ian WIDLOW

Ian WIDLOW has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Component, method of manufacturing the component, and method of cleaning the component
    Patent number: 11694879
    Abstract: A component, a method of manufacturing a component, and a method of cleaning a component is provided. The component includes a gas flow system within the component, wherein the gas flow system fluidly couples one or more inlet holes and one or more outlet holes. The manufacturing of the component results in an arc shaped groove and a circumferential groove created in the body of the ring. The component undergoes one or more cleaning operations, including rinsing, baking, or purging operations. The cleaning operations remove debris or particles in or on the component, where the debris or particles can be caused during manufacturing of the component, or during use of the component in a semiconductor processing system.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: July 4, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Ian Widlow, Govinda Raj, Gary U. Keppers, Aravind Dugganna Naik, Francisco Rodarte, Sudhir R. Gondhalekar, Ravikumara Kodinaganhalli
  • Brazed joint and semiconductor processing chamber component having the same
    Patent number: 11560913
    Abstract: Methods of forming a metallic-ceramic brazed joint are disclosed herein. The method of forming the brazed joint includes deoxidizing the surface of metallic components, assembling the joint, heating the joint to fuse the joint components, and cooling the joint. In certain embodiments, the brazed joint includes a conformal layer. In further embodiments, the brazed joint has features in order to reduce stress concentrations within the joint.
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: January 24, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Govinda Raj, Tom K. Cho, Hamid Mohiuddin, Ian Widlow
  • Component, Method Of Manufacturing The Component, And Method Of Cleaning The Component
    Publication number: 20200185202
    Abstract: A component, a method of manufacturing a component, and a method of cleaning a component is provided. The component includes a gas flow system within the component, wherein the gas flow system fluidly couples one or more inlet holes and one or more outlet holes. The manufacturing of the component results in an arc shaped groove and a circumferential groove created in the body of the ring. The component undergoes one or more cleaning operations, including rinsing, baking, or purging operations. The cleaning operations remove debris or particles in or on the component, where the debris or particles can be caused during manufacturing of the component, or during use of the component in a semiconductor processing system.
    Type: Application
    Filed: October 25, 2019
    Publication date: June 11, 2020
    Inventors: Ian WIDLOW, Govinda RAJ, Gary U. KEPPERS, Aravind Dugganna NAIK, Francisco RODARTE, Sudhir R. GONDHALEKAR, Ravikumara KODINAGANHALLI
  • BRAZED JOINT AND SEMICONDUCTOR PROCESSING CHAMBER COMPONENT HAVING THE SAME
    Publication number: 20190226512
    Abstract: Methods of forming a metallic-ceramic brazed joint are disclosed herein. The method of forming the brazed joint includes deoxidizing the surface of metallic components, assembling the joint, heating the joint to fuse the joint components, and cooling the joint. In certain embodiments, the brazed joint includes a conformal layer. In further embodiments, the brazed joint has features in order to reduce stress concentrations within the joint.
    Type: Application
    Filed: January 16, 2019
    Publication date: July 25, 2019
    Inventors: Govinda RAJ, Tom K. CHO, Hamid MOHIUDDIN, Ian WIDLOW