Patents by Inventor Ibrahim ACAN

Ibrahim ACAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE HOLDER, CARRIER SYSTEM COMPRISING A SUBSTRATE HOLDER AND LITHOGRAPHIC APPARATUS
    Publication number: 20230333488
    Abstract: A substrate holder to hold a substrate in a substrate holding position, the substrate holder including: a frame, multiple surface clamping devices arranged on the frame to clamp a substrate at an upper surface thereof, wherein the surface clamping devices each have a clamping pad to be arranged on the upper surface of the substrate, the surface clamping pads being movable with respect to each other at least in a first direction substantially perpendicular to the upper surface of a substrate held by the surface clamping pads, and one or more actuators to move the surface clamping pads with respect to each other in the first direction.
    Type: Application
    Filed: August 20, 2021
    Publication date: October 19, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Krijn Frederik BUSTRAAN, Arjan GIJSBERTSEN, Paul VAN DONGEN, Ibrahim ACAN