Patents by Inventor Ichiro Akagi

Ichiro Akagi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11914284
    Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light, the substrate, the multilayer reflective film, the protection film, and the phase shift film being arranged in this order. The phase shift film contains at least one first element X1 selected from the first group consisting of ruthenium (Ru), iridium (Ir), platinum (Pt), palladium (Pd), and gold (Au), and at least one second element X2 selected from the second group consisting of oxygen (O), boron (B), carbon (C), and nitrogen (N). In the phase shift film, a chemical shift of a peak of 3d5/2 or a peak of 4f7/2 of the first element X1 observed by X-ray electron spectroscopy is less than 0.3 eV.
    Type: Grant
    Filed: July 3, 2023
    Date of Patent: February 27, 2024
    Assignee: AGC Inc.
    Inventors: Daijiro Akagi, Shunya Taki, Takuma Kato, Ichiro Ishikawa, Kenichi Sasaki
  • Patent number: 10047401
    Abstract: The invention provides novel biomarkers (four genes BRCA1, HIF1A, DLC1, and XPO1 alone or in combination of miR-21) for early stage lung cancer.
    Type: Grant
    Filed: August 20, 2013
    Date of Patent: August 14, 2018
    Assignee: The United States of America, as represented by the Secretary, Department of Health & Human Services
    Inventors: Curtis C. Harris, Aaron Joseph Schetter, Hirokazu Okayama, Ichiro Akagi
  • Publication number: 20150337385
    Abstract: The invention provides novel biomarkers (four genes BRCA1, HIF1A, DLC1, and XPO1 alone or in combination CODING GENE SELECTION of miR-21) for early stage lung cancer.
    Type: Application
    Filed: August 20, 2013
    Publication date: November 26, 2015
    Inventors: Curtis C. Harris, Aaron Joseph Schetter, Hirokazu Okayama, Ichiro Akagi