Abstract: A transfer device for a substrate is capable of preventing deformation or breakage of the substrate due to bending stress by reducing the amount of dead weight deflection of the substrate, e.g. a large mother glass board. Supporting members extend in opposite directions from two sides of a storage device such that the substrate can be introduced or removed by raising and lowering the hand of a transfer machine inserted into the storage device between the supporting members. The supporting members are comprised of a plurality of supporting members in parallel, formed with a gap between the supporting members facing each other.

Abstract: The objective of the present invention is to provide a transfer device for substrate capable of preventing deformation or breakage of substrate due to bending stress, by reducing the amount of dead weight deflection of substrate, such as large mother glass boards, etc.

Abstract: A conveyor for use in a room with a high degree of cleanness and which can convey wafers one by one stably, without generation of dust. The conveyor has vehicles having a slit in the surface on which a wafer can be placed, permanent magnets provided on the undersurface of the vehicle, and a magnetic fluid interposed between the permanent magnets and a transporting course for floating the vehicle. By moving the vehicle along the transporting course by linear motors or by driving devices of the rope trolley type, wafers are conveyed one by one on the vehicle.

Abstract: A conveyor means for transporting precision parts is divided into a plurality of block units and compressed air is supplied selectively to each block unit where a transporting pallet is present so as to reduce consumption of compressed air to the minimum. Also, it ensures high carrying efficiency because of its slow starting and slow stopping without reducing the speed during running.

Abstract: A switching device for a transporting track on which a pallet travels supported on a cushion of air which includes a rotatable track having air jets to support the pallet and which is supported on an air bearing, a first linear motor for turning the air bearing, a second linear motor for driving and braking the pallet and a positioning device for accurately positioning the rotatable track in alignment with a fixed regular track.

Abstract: A moving object stop control method using a linear motor comprising a movable element mounted to the moving object and a pair of stators disposed to put therebetween the stop position of the moving object, the pair of stators being applied with exciting voltages opposite phase to each other, the exciting voltages each being reduced of amplitude only by a desired magnitude intermittently with the predetermined timing.