Abstract: A spectrometry device wherein light rays emitted from an object face measurement point combine into one parallel light beam by an objective lens, this is divided into a first and second light beam by a phase shifter, and the first and second light beam emit toward a light-receiving face of a photodetector while providing an optical path length difference. A light-shielding plate is arranged on a face optically conjugate the object face respective to the objective lens, and only light passed through translucent portions of the light-shielding plate is directed to the objective lens. A lateral length of each light-shielding plate translucent portion and the interval between two adjacent translucent portions are based on the objective lens focal length, the distance from the phase shifter to the photodetector light-receiving face, a photodetector pixel pitch, a pixel length, and a predetermined wavelength range of the light emitted from the measurement point.

Abstract: A combining light emitted from a measurement point of an object to be measured into one parallel light beam by combining optical system; dividing, by phase shifter, parallel light beam emitted from combining optical system into first and second light beam, emitting first and second light beam toward light-receiving face while providing an optical path length difference between the first and second light beam, and causing the first and second light beam to planarly enter the light-receiving face so that at least a part of an incident region of first light beam on the light-receiving face and at least a part of an incident region of second light beam overlap with each other; and obtaining an interferogram at measurement point based on intensity distribution of light in a region where an incident region of the first and second light beam on light-receiving face overlap, and acquiring spectrum by Fourier-transforming interferogram.

Abstract: Optical measuring apparatus includes: a light source irradiating an object to be measured; a splitter splitting transmitted light or reflected light from the object to be measured; a phase changer changing a phase of a first light which is one of the lights split; a phase fixer maintaining a phase of a second light which is the other light split; a multiplexer multiplexing lights output from the phase changer and the phase fixer; a detector detecting the light (interference image) output from the multiplexer; and a controller that extracts a reference point from the interference image, when a displacement of the reference point is detected, corrects a luminance value for each pixel of the interference images in accordance with a displacement of the object to be measured indicated by a displacement of the reference point, constructs an interferogram based on the luminance value for each pixel of the interference images after the correction.

Abstract: A combining light emitted from a measurement point of an object to be measured into one parallel light beam by combining optical system; dividing, by phase shifter, parallel light beam emitted from combining optical system into first and second light beam, emitting first and second light beam toward light-receiving face while providing an optical path length difference between the first and second light beam, and causing the first and second light beam to planarly enter the light-receiving face so that at least a part of an incident region of first light beam on the light-receiving face and at least a part of an incident region of second light beam overlap with each other; and obtaining an interferogram at measurement point based on intensity distribution of light in a region where an incident region of the first and second light beam on light-receiving face overlap, and acquiring spectrum by Fourier-transforming interferogram.

Abstract: A light source, a standing wave forming unit, a detector, and an absorbance calculating unit. The light source irradiates a sample with light. The standing wave forming unit forms, in the sample, an acoustic standing wave perpendicular to a surface of the sample. A node of the acoustic standing wave is positioned at a predetermined distance from the surface of the sample, the light from the light source entering the surface of the sample. The detector detects light emitted from the surface of the sample, and is disposed on the surface of the sample on a side where the light source is disposed. The absorbance calculating unit obtains absorbance.

Abstract: Optical measuring apparatus includes: a light source irradiating an object to be measured; a splitter splitting transmitted light or reflected light from the object to be measured; a phase changer changing a phase of a first light which is one of the lights split; a phase fixer maintaining a phase of a second light which is the other light split; a multiplexer multiplexing lights output from the phase changer and the phase fixer; a detector detecting the light (interference image) output from the multiplexer; and a controller that extracts a reference point from the interference image, when a displacement of the reference point is detected, corrects a luminance value for each pixel of the interference images in accordance with a displacement of the object to be measured indicated by a displacement of the reference point, constructs an interferogram based on the luminance value for each pixel of the interference images after the correction.

Abstract: A light source, a standing wave forming unit, a detector, and an absorbance calculating unit. The light source irradiates a sample with light. The standing wave forming unit forms, in the sample, an acoustic standing wave perpendicular to a surface of the sample. A node of the acoustic standing wave is positioned at a predetermined distance from the surface of the sample, the light from the light source entering the surface of the sample. The detector detects light emitted from the surface of the sample, and is disposed on the surface of the sample on a side where the light source is disposed. The absorbance calculating unit obtains absorbance.

Abstract: A light measurement device that maintains high measurement precision. The light measurement device includes: light source that irradiates light upon measurement object; branch part that splits transmitted light or reflected light from measurement object; phase-changing unit that changes the phase of one beam of the branched light beams; phase-fixing unit that maintains the phase of the other beam of the branched light beams; adjustment mechanism, which is provided in phase-changing unit or phase-fixing unit, for adjusting the propagation direction of light; multiplexer that causes the light emitted by each of phase-changing unit and phase-fixing unit to interfere with each other; detection unit that detects light that is interfered with by multiplexer; and control unit that controls the adjustment mechanism on the basis of the luminance values of an interference image that is detected by detection unit and adjusts the propagation direction of light in phase-changing unit or phase-fixing unit.

Abstract: A living body is accurately determined while minimizing increases in the size of a device and increases in the number of components.

Abstract: Reflected light detecting device and method with surface reflected light components collectively be extracted/removed when detecting reflected light arising in casting light onto target-object range having non-planar surface.

Abstract: A light measurement device that maintains high measurement precision. The light measurement device includes: light source that irradiates light upon measurement object; branch part that splits transmitted light or reflected light from measurement object; phase-changing unit that changes the phase of one beam of the branched light beams; phase-fixing unit that maintains the phase of the other beam of the branched light beams; adjustment mechanism, which is provided in phase-changing unit or phase-fixing unit, for adjusting the propagation direction of light; multiplexer that causes the light emitted by each of phase-changing unit and phase-fixing unit to interfere with each other; detection unit that detects light that is interfered with by multiplexer; and control unit that controls the adjustment mechanism on the basis of the luminance values of an interference image that is detected by detection unit and adjusts the propagation direction of light in phase-changing unit or phase-fixing unit.

Abstract: A living body is accurately determined while minimizing increases in the size of a device and increases in the number of components.

Abstract: Reflected light detecting device and method with surface reflected light components collectively be extracted/removed when detecting reflected light arising in casting light onto target-object range having non-planar surface.

Abstract: In a microparticle measurement device, a sample is passed through each channel in a multi-flow channel, and a predetermined linear area is illuminated with light. Measurement light originating from a microparticle in the sample, such as scattered or fluorescent light, is shaped into a parallel beam by an objective lens and passes through a first and second transmission portions. The beams transmitted through these two portions are converged as first and second measurement beams onto the same straight line by a cylindrical lens. The intensity of the interference light formed by these beams is detected with a detector. Meanwhile, the light emitted from the light source and passing through the multi-flow channel without hitting the microparticle falls through the objective lens onto a non-reflection portion and does not travel toward the cylindrical lens. Accordingly, only the interference light formed by the measurement beams is allowed to fall onto the detector.

Abstract: In a microparticle measurement device, a sample is passed through each channel in a multi-flow channel, and a predetermined linear area is illuminated with light. Measurement light originating from a microparticle in the sample, such as scattered or fluorescent light, is shaped into a parallel beam by an objective lens and passes through a first and second transmission portions. The beams transmitted through these two portions are converged as first and second measurement beams onto the same straight line by a cylindrical lens. The intensity of the interference light formed by these beams is detected with a detector. Meanwhile, the light emitted from the light source and passing through the multi-flow channel without hitting the microparticle falls through the objective lens onto a non-reflection portion and does not travel toward the cylindrical lens. Accordingly, only the interference light formed by the measurement beams is allowed to fall onto the detector.

Abstract: A defect inspection apparatus including: a first illumination optical system which is configured to illuminate the inspection area on a sample surface from a normal line direction or a direction near thereof with respect to said sample surface; a second illumination optical system which is configured to illuminate said inspection area from a slant direction with respect to said sample surface; a detection optical system having a plurality of first detectors which are located, in front of, on the sides of, and behind said inspection area, respectively, with respect to the illumination direction of said second illumination optical system, and where the regular reflected light component, from said sample surface, by illumination light of said second illumination optical system, is not converged; and a signal processing system which is configured to inspect a defect, upon basis of signals obtained from said plurality of first detectors.

Abstract: A spectroscopic measurement device includes a dark filter that is arranged on an optical path between an imaging optical system and a light detection unit and includes a plurality of regions having different transmittances, the filter being configured such that a fixed reflected measurement light and a movable reflected measurement light that are guided to a same point by the imaging optical system and form interference light are transmitted through a same region; and an arithmetic processing unit that obtains an interferogram of the measurement light at a transmittance corresponding to each of two or more regions from a detection signal of each pixel of a light detection unit when a movable reflection unit is moved, and obtains a spectrum of the measurement light based on the interferogram.

Abstract: A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.

Abstract: A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.

Abstract: The present invention causes measurement light, emitted from an object and to be measured, to enter a fixed mirror and a movable mirror forming interfering light between the measurement light reflected by the fixed mirror and measurement light reflected by the movable mirror. Change to the intensity of the interference light of measurement light is obtained by moving the movable mirror unit, acquiring the interferogram of measurement light. Reference light of a narrow wavelength band included in a wavelength band of the measurement light enters the fixed mirror and the movable mirror, forming interference light of the reference light. The movable mirror is moved to correct the interferogram of measurement light, which is at the same wavelength as the reference light in the measurement light, and the reference light, and a spectrum of the measurement light is acquired based on the corrected interferogram.