Patents by Inventor Ichiroh Oki

Ichiroh Oki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for preparing a silicon nitride insulating film for semiconductor memory device
    Patent number: 5013692
    Abstract: A process for preparing an insulating film for semiconductor memory device which comprises forming a silicon nitride film over a substrate by a CVD technique, oxidizing the surface of the silicon nitride film to form a silicon oxide layer over the film, and removing the silicon oxide layer by etching to form an improved silicon nitride film, which is suitably used for the formation of a capacitor of highly integrated memory device.
    Type: Grant
    Filed: December 5, 1989
    Date of Patent: May 7, 1991
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Shigeaki Ide, Ichiroh Oki