Patents by Inventor Ie-Fun Lai

Ie-Fun Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fault detection and classification (FDC) specification management apparatus and method thereof
    Patent number: 7254513
    Abstract: An apparatus for fault detection and classification (FDC) specification management including a storage device and a process module. The storage device stores a specification management record and a chart profile record. The specification management record stores statistical algorithm settings of a parameter and the chart profile record stores chart frame and alarm condition information. The process module, which resides in a memory, receives a manipulation message corresponding to the specification management record, and accordingly manipulates the chart profile record.
    Type: Grant
    Filed: September 22, 2004
    Date of Patent: August 7, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mu-Tsang Lin, Yi-Yu Wu, Chia-Hung Chung, Jian-Hong Chen, Chon-Hwa Chu, Ie-Fun Lai, Wen-Sheng Chien
  • Automatic statistical process control (SPC) chart generation apparatus and method thereof
    Patent number: 7117058
    Abstract: A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.
    Type: Grant
    Filed: June 24, 2004
    Date of Patent: October 3, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mu-Tsang Lin, Tien-Wen Wang, Joseph W. L. Fang, Ie-Fun Lai, Chon-Hwa Chu, Jian-Hong Chen, Chin-Chih Chen, Yu-Yi Wu, Yao-Wen Wu, Wen-Sheng Chien
  • Fault detection and classification (FDC) specification management apparatus and method thereof
    Publication number: 20060075314
    Abstract: An apparatus for fault detection and classification (FDC) specification management including a storage device and a process module. The storage device stores a specification management record and a chart profile record. The specification management record stores statistical algorithm settings of a parameter and the chart profile record stores chart frame and alarm condition information. The process module, which resides in a memory, receives a manipulation message corresponding to the specification management record, and accordingly manipulates the chart profile record.
    Type: Application
    Filed: September 22, 2004
    Publication date: April 6, 2006
    Inventors: Mu-Tsang Lin, Yi-Yu Wu, Chia-Hung Chung, Jian-Hong Chen, Chon-Hwa Chu, Ie-Fun Lai, Wen-Sheng Chien
  • Automatic statistical process control (SPC) chart generation apparatus and method thereof
    Publication number: 20050288810
    Abstract: A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.
    Type: Application
    Filed: June 24, 2004
    Publication date: December 29, 2005
    Inventors: Mu-Tsang Lin, Tien-Wen Wang, Joseph Fang, Ie-Fun Lai, Chon-Hwa Chu, Jian-Hong Chen, Chin-Chih Chen, Yu-Yi Wu, Yao-Wen Wu, Wen-Sheng Chien