Abstract: A microelectromechanical system (MEMS) optical device is introduced which includes a mirror constructed on a substrate. The mirror is movable parallel to the surface of the substrate to control whether an input ray passes undisturbed or is reflected to an alternate output. In one embodiment, a variation on a comb-drive designed to produce larger forces than usual uses an envelope-like electrode into which the mirror is drawn. In a second embodiment, a mirror is supported on flexible beams which are attracted or repelled by electrostatically charging curved electrodes thereby actuating the mirror. In a third embodiment, a magnetic field around the switch induces lateral forces when electric current flows in conductive supporting beams.

Abstract: A switching device that receives a plurality of input signals and provides a plurality of output signals has switches arranged in a two- or three-dimensional array configurations. At least two of the switches, which are preferably microelectromechanical or MEMS switches, reside on distinct physical substrate layers in the switching device, and at least one of the signals travels through a penetrable zone of one of the physical substrate layers. Three dimensional switching device blocks can be conveniently arranged in a Clos configuration or other switching configurations to reduce blocking and avoid rearrangement. The switching devices may be used to switch optical signals and may include mirrors as switching elements.

Abstract: A microelectromechanical (MEMS) device has a substrate, and a generally planar moving element, such as a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.