Patents by Inventor Igeta Masanobu

Igeta Masanobu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for increasing tensile stress in a thin film using multi-frequency electromagnetic radiation
    Publication number: 20060226518
    Abstract: A method and system are described for increasing the tensile stress in thin films formed on a substrate, such as silicon nitride films. The thin film may be a planar film, or a non-planar film, such as a nitride film formed over a NMOS gate. The thin film is exposed to electromagnetic (EM) radiation, such as EM radiation having a wavelength component less than about 500 nm. The EM source can include a multi-frequency source of radiation. Additionally, the source of radiation is collimated in order to selectively treat regions of a non-planar film.
    Type: Application
    Filed: March 29, 2005
    Publication date: October 12, 2006
    Inventors: Igeta Masanobu, Cory Wajda, Gert Leusink