Abstract: A microwave resonance plasma generating apparatus, a plasma processing system having the same and a method of generating a microwave resonance plasma are provided. The apparatus includes a microwave generating unit which generates a microwave, and a plasma producing unit which produces electrons and photons of high energy using the microwave generated from the microwave generating unit. The plasma producing unit includes a coaxial waveguide having an inner electrode disposed adjacent to the microwave generating unit, an outer electrode connected to the microwave generating unit and disposed to coaxially surround a portion of the inner electrode, the outer electrode being shorter than the inner electrode, and a dielectric tube disposed between the inner electrode and the outer electrode to insulate between the inner electrode and the outer electrode. The coaxial waveguide utilizes a principle of “cut or truncated electrode of coaxial waveguide” and a resonance phenomenon of Langmiur.

Abstract: The present invention provides an apparatus suitable for use in the treatment of liquid 31, comprising a high voltage electric discharge device 8 with spaced apart first second electrodes 24,25. The discharge device has electrical power supply control means 13 for applying a series of high voltage pulses across said first and second electrodes 24,25 50 as to produce an extended area electrical discharge in an electric discharge zone 37 extending between said first and second electrodes. The apparatus also has a gas delivery means 14-18,29 for feeding a series of bubbles 36 of gas into the liquid in said electric discharge zone. The present invention also provides methods of producing an electrical discharge in a liquid and of decontaminating water and other liquids using the apparatus of the invention.

Abstract: The present invention provides an apparatus suitable for use in the treatment of liquid 31, comprising a high voltage electric discharge device 8 with spaced apart first second electrodes 24,25. The discharge device has electrical power supply control means 13 for applying a series of high voltage pulses across said first and second electrodes 24,25 so as to produce an extended area electrical discharge in an electric discharge zone 37 extending between said first and second electrodes. The apparatus also has a gas delivery means 14-18,29 for feeding a series of bubbles 36 of gas into the liquid in said electric discharge zone.