Patents by Inventor Igor Bouchoms

Igor Bouchoms has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20070070315
    Abstract: Methods and apparatus for maintaining the thermal equilibrium of a substrate and an immersion lithographic apparatus are disclosed using or having a timetable comprising information regarding the position, speed and/or acceleration of the substrate; and an evaporation controller and/or condensation controller acting to decrease localized evaporation and/or increase localized condensation in response to the information in the timetable. Evaporation of liquid from the surface of the substrate cools it down, while condensing liquid on its bottom surface heats the substrate locally.
    Type: Application
    Filed: June 16, 2006
    Publication date: March 29, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Johannes Jacobs, Igor Bouchoms, Nicolaas Kate, Nicolaas Kemper, Martinus Leenders, Erik Loopstra, Joost Ottens, Martinus Verhagen, Yucel Kok, Johannes Van Es, Herman Boom, Franciscus Janssen