Patents by Inventor Igor Gory

Igor Gory has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stiction resistant release process
    Patent number: 7087456
    Abstract: A method of releasing a micro-electronic device formed over an insulator of a silicon-on-insulator (SOI) substrate. In one embodiment, the release method includes etching at least a portion of the insulator to separate the micro-electronic device from the SOI substrate, rinsing at least the micro-electronic device, exposing at least the micro-electronic device to a micro-sphere solution and removing the micro-electronic device from the SOI substrate. The release method may also include exposing the micro-electronic device to an etching plasma to substantially expunge the micro-sphere solution.
    Type: Grant
    Filed: October 7, 2003
    Date of Patent: August 8, 2006
    Assignee: Zyvex Corporation
    Inventors: Igor Gory, Bruce Gnade, Fadziso Mantiziba
  • Stiction resistant release process
    Publication number: 20050074913
    Abstract: A method of releasing a micro-electronic device formed over an insulator of a silicon-on-insulator (SOI) substrate. In one embodiment, the release method includes etching at least a portion of the insulator to separate the micro-electronic device from the SOI substrate, rinsing at least the micro-electronic device, exposing at least the micro-electronic device to a micro-sphere solution and removing the micro-electronic device from the SOI substrate. The release method may also include exposing the micro-electronic device to an etching plasma to substantially expunge the micro-sphere solution.
    Type: Application
    Filed: October 7, 2003
    Publication date: April 7, 2005
    Applicant: Zyvex Corporation
    Inventors: Igor Gory, Bruce Gnade, Fadziso Mantiziba