Abstract: The invention relates to the production of liquid-crystal films and coatings from substituted poly-para-xylylenes to be used as alignment layers in different electrooptical devices (alphameric indicators, displays, optical shutters, etc.). Particularly, the invention is directed to a one-step method for producing a liquid-crystal polymer film of the substituted poly-para-xylylene, said film simultaneously exhibiting the orienting properties with respect to LC molecules. The essence of a claimed method is in production of films and coatings from the substituted poly-para-xylylene by means of the successive execution in vacuum of sublimation at 0-350° C. and pyrolysis at 450-700° C. of the substituted cyclic di-para-xylylene in which substituent groups have terminal mesogenic groups, and condensation of the pyrolysis-generated substituted para-xylylene simultaneously with its polymerization on a substrate at 150-320° C. The process is performed at a predetermined film formation rate on the substrate surface.

Abstract: An organic polymer film of low dielectric constant and high heating resistance which is applicable as insulating layers of semiconductor devices, a method of manufacturing the organic polymer film, and a semiconductor device using the organic polymer film.

Abstract: An organic polymer film of low dielectric constant and high heating resistance which is applicable as an insulating layer of a semiconductor devices is provided, as well as a manufacturing method for the film and a semiconductor device incorporating the film.