Patents by Inventor Igor Krayvitz

Igor Krayvitz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for use in the monitoring of samples with a charged particle beam
    Patent number: 7034297
    Abstract: A method and apparatus for use in monitoring a sample with a charged particle beam are presented. A mechanical displacement between a plane defined by the sample's surface and an optical axis defined by a beam directing arrangement is provided so as to orient the sample at a certain non-right angle ?1 with respect to the optical axis. A primary charged particle beam propagating towards the sample is deflected so as to affect the trajectory of the primary charged particle beam to provide a certain non-zero angle ?2 between the primary beam propagation axis and said optical axis.
    Type: Grant
    Filed: March 5, 2003
    Date of Patent: April 25, 2006
    Assignee: Applied Materials, Israel, Ltd.
    Inventors: Igor Petrov, Zvika Rosenberg, Pavel Adamec, Igor Krayvitz
  • Method and system for use in the monitoring of samples with a charged particles beam
    Publication number: 20040173746
    Abstract: A method and apparatus for use in monitoring a sample with a charged particle beam are presented. A mechanical displacement between a plane defined by the sample's surface and an optical axis defined by a beam directing arrangement is provided so as to orient the sample at a certain non-right angle &thgr;1 with respect to the optical axis. A primary charged particle beam propagating towards the sample is deflected so as to affect the trajectory of the primary charged particle beam to provide a certain non-zero angle &thgr;2 between the primary beam propagation axis and said optical axis.
    Type: Application
    Filed: March 5, 2003
    Publication date: September 9, 2004
    Applicant: Applied Materials Israel Ltd
    Inventors: Igor Petrov, Zvika Rosenberg, Pavel Adamec, Igor Krayvitz