Patents by Inventor Igor L. Goldman

Igor L. Goldman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiant heating source with reflective cavity spanning at least two heating elements
    Patent number: 6947665
    Abstract: A radiant source for heating a workpiece such as a semiconductor wafer includes a plurality of radiant heating elements, arranged in an array that is generally concentric about a source center axis. A reflector has a reflecting surface that bounds a cavity or channel that contains the heating elements, the reflector comprising walls that extend around the center axis and that are finished for reflecting radiant energy emitted by the heating elements to a region occupied by a wafer. The channel reflecting surfaces comprise at least a part of a plane and/or cylinder and/or a cone and/or a convex to the heating elements curved surface of revolution bordering or spanning two or more adjacent heating elements.
    Type: Grant
    Filed: February 10, 2003
    Date of Patent: September 20, 2005
    Assignee: Axcelis Technologies, Inc.
    Inventors: Christopher J. Garmer, Feliks B. Kleyner, Ilya M. Ayzman, Igor L. Goldman
  • Radiant heating source
    Publication number: 20040156625
    Abstract: A radiant source for heating a workpiece such as a semiconductor wafer including a plurality of radiant heating elements, arranged in an array that is generally concentric about a source center axis. A reflector has a reflecting surface that bounds a cavity or channel that contains the heating elements, said reflector comprising walls that extend around the center axis and that are finished for reflecting radiant energy emitted by the heating elements to a region occupied by a wafer. The channel reflecting surfaces comprise at least a part of a plane and/or cylinder and/or a cone and/or a convex to said heating elements curved surface of revolution bordering or spanning two or more adjacent heating elements.
    Type: Application
    Filed: February 10, 2003
    Publication date: August 12, 2004
    Applicant: Axcelis Technologies
    Inventors: Christopher J. Garmer, Feliks B. Kleyner, Ilya M. Ayzman, Igor L. Goldman