Patents by Inventor Igor Matheus Petronell AARTS

Igor Matheus Petronell AARTS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Adaptive Filter for In-Line Correction
    Publication number: 20190227443
    Abstract: A method of applying a measurement correction includes calculating a first correction value based on a first coefficient and the measurement; calculating a second correction value based on a second coefficient, greater than the first coefficient, and the measurement; and calculating a third correction value based on a third coefficient, greater than the second coefficient, and the measurement. The method also includes applying the third correction value to the measurement if a difference between the first correction value and the third correction value is above a first threshold value; applying the second correction value to the measurement if a difference between the first correction value and the second correction value is above a second threshold value; and applying the first correction value to the measurement if the difference between the first correction value and the second correction value is below or equal to the second threshold value.
    Type: Application
    Filed: June 26, 2017
    Publication date: July 25, 2019
    Applicant: ASML Holding N.V.
    Inventors: Eric Brian CATEY, Igor Matheus Petronell AARTS, Robert Anthony AUGELLI, Sergey MALYK