Abstract: Navigation systems and methods for autonomous vehicles are provided. The navigation system may include multiple navigation subsystems, including one having an inertial measurement unit (IMU). That unit may serve as the primary unit for navigation purposes, with other navigation subsystems being treated as secondary. The other navigation subsystems may include global positioning system (GPS) sensors, and perception sensors. In some embodiments, the navigation system may include a first filter for the IMU sensor and separate filters for the other navigation subsystems.

Abstract: Navigation systems and methods for autonomous vehicles are provided. The navigation system may include multiple navigation subsystems, including one having an inertial measurement unit (IMU). That unit may serve as the primary unit for navigation purposes, with other navigation subsystems being treated as secondary. The other navigation subsystems may include global positioning system (GPS) sensors, and perception sensors. In some embodiments, the navigation system may include a first filter for the IMU sensor and separate filters for the other navigation subsystems.

Abstract: According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.

Abstract: A gyroscope includes a substrate, a proof mass coupled to the substrate and configured to move in direction of an X axis and in direction of a Y axis orthogonal to the first axis, an X axis shuttle to selectively drive the proof mass along the X axis as a drive axis or sense movement of the proof mass along the X axis as a sense axis in response to the proof mass driven along the Y axis as the drive axis, and a Y axis shuttle to selectively sense movement of the proof mass along the Y axis as a sense axis in response to the proof mass driven along the X axis or drive the proof mass along the Y axis as the drive axis. The X axis shuttle is symmetric to the Y axis shuttle along a diagonal axis that is diagonal to both the X axis and the Y axis. The X and Y axis shuttles have gaps designed for a predetermined DC voltage to generate spring softening (negative cubic nonlinearity) that is equal to spring hardening (positive cubic nonlinearity), ensuring linear motion at high amplitudes (? of the capacitive gap).

Abstract: Microelectromechanical systems (MEMS) yaw gyroscopes having out-of-plane quadrature trim electrodes are described. The gyroscope includes a proof mass configured to be driven in-plane. The proof mass includes an opening, or a plurality of openings. The out-of-plane quadrature trim electrodes are positioned to laterally overlap edges of the opening in a projection plane. The out-of-plane quadrature trim electrodes trim in-plane motion of the proof mass in one or two directions to limit quadrature motion. The out-of-plane quadrature trim electrodes may be arranged in a symmetric pattern to enable mode switching.

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

Abstract: According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.

Abstract: According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.

Abstract: A MEMS device is provided comprising a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; a drive structure comprising at least one electrode and configured to drive the proof mass to move along the resonator axis; and a pivoting linkage coupled to the proof mass at first and second ends of the pivoting linkage, the first end comprising a first fixed pivot and the second end comprising a second fixed pivot, the pivoting linkage comprising: a first bar configured to pivot about the first fixed pivot and a first dynamic pivot; a second bar configured to pivot about the second fixed pivot and a second dynamic pivot; and a third bar configured to pivot about the first dynamic pivot and the second dynamic pivot, wherein the proof mass moves along the resonator axis when the pivoting linkage pivots.

Abstract: An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

Abstract: According to some aspects, there is provided a microelectromechanical systems (MEMS) device wherein one or more components of the MEMS device exhibit attenuated motion relative to one or more other moving components. The MEMS device may comprise a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; and a first shuttle coupled to the proof mass and comprising one of a drive structure configured to drive the proof mass along the resonator axis or a sense structure configured to move along a second axis substantially perpendicular to the resonator axis in response to motion of the proof mass along the resonator axis, wherein displacement of at least a first portion of the proof mass is attenuated relative to displacement of the first shuttle and/or a second portion of the proof mass.

Abstract: A MEMS device is provided comprising a substrate; a proof mass coupled to the substrate and configured to move along a resonator axis; a drive structure comprising at least one electrode and configured to drive the proof mass to move along the resonator axis; and a pivoting linkage coupled to the proof mass at first and second ends of the pivoting linkage, the first end comprising a first fixed pivot and the second end comprising a second fixed pivot, the pivoting linkage comprising: a first bar configured to pivot about the first fixed pivot and a first dynamic pivot; a second bar configured to pivot about the second fixed pivot and a second dynamic pivot; and a third bar configured to pivot about the first dynamic pivot and the second dynamic pivot, wherein the proof mass moves along the resonator axis when the pivoting linkage pivots.

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

Abstract: Navigation systems and methods for autonomous vehicles are provided. The navigation system may include multiple navigation subsystems, including one having an inertial measurement unit (IMU). That unit may serve as the primary unit for navigation purposes, with other navigation subsystems being treated as secondary. The other navigation subsystems may include global positioning system (GPS) sensors, and perception sensors. In some embodiments, the navigation system may include a first filter for the IMU sensor and separate filters for the other navigation subsystems.

Abstract: Novel structural features applicable to a variety of inertial sensors. A composite ring composed of concentric subrings is supported by a compliant support structure suspending the composite ring relative to a substrate. The compliant support structure may either be interior or exterior to the composite ring. The compliant support may be composed of multiple substantially concentric rings coupled to neighboring rings by transverse members regularly spaced at intervals that vary with radius relative to a central axis of symmetry. Subrings making up the composite ring may vary in width so as to provide larger displacement amplitudes at intermediate radii, for example. In other embodiments, electrodes are arranged to reduce sensitivity to vibration and temperature, and shock stops are provided to preclude shorting in response to shocks.

Abstract: An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.

Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit linear anti-phase motion. Some of the described couplers are flexural and provide two degrees of freedom of motion of the coupled masses. Some such couplers are positioned between the coupled masses. Using multiple couplers which are arranged to move in linearly opposite directions during linear anti-phase motion of the coupled masses provides momentum-balanced operation.