Patents by Inventor Igor Petronella AARTS

Igor Petronella AARTS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR AND METHOD OF SENSING ALIGNMENT MARKS
    Publication number: 20220291598
    Abstract: An apparatus for and method of sensing alignment marks in which a self-referencing interferometer based sensor outputs standing images of the alignment marks and camera device is used to capture the images as output by the sensor and a detector is used to obtain phase information about the alignment marks from the images as output by the sensor.
    Type: Application
    Filed: September 28, 2020
    Publication date: September 15, 2022
    Applicant: ASML Holding N.V.
    Inventors: Krishanu SHOME, Igor Petronella AARTS, Junwon LEE