Patents by Inventor Igor Shvartsman

Igor Shvartsman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INTEGRATED METROLOGY SYSTEM
    Publication number: 20230061147
    Abstract: An integrated metrology system for evaluating semiconductor wafers, the metrology system comprises a main body that has a rear side and a front side; the front side defines a front border of the main body; one or more detachable supporting units that are detachably coupled to the main body and support the main body while extending outside the front border; and at least one auxiliary supporting unit that is configured to support the main body at an absence of the one or more detachable supporting units
    Type: Application
    Filed: January 27, 2021
    Publication date: March 2, 2023
    Applicant: NOVA LTD.
    Inventors: Alex Shichtman, Beni Shulman, Igor Shvartsman