Patents by Inventor Igor Slobodnik

Igor Slobodnik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and apparatus for line alignment to compensate for static and dynamic inaccuracies in scanning
    Patent number: 6831736
    Abstract: In a method and apparatus for compensating for static and dynamic inaccuracies in an optical scanner used in a typical surface inspection system, the scanner may have a scanning axis and a cross-scanning axis. A surface of an inspection article is scanned along a scanning axis and a scanning axis signal is output at predetermined distances along this axis. The scanning axis signal may be used to determine a speed of relative movement between the scanner and the inspection article. A jitter signal may be output whenever the scanner deviates from the scanning axis, and this signal may be used to calculate the amount of deviation. Information, such as the speed of relative movement, scan line resolution, and a scanning axis static position error may be used to generate a scan line. A generated scan line may be shifted to compensate for a cross-scanning axis error.
    Type: Grant
    Filed: October 7, 2002
    Date of Patent: December 14, 2004
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Rami Elichai, Gilad Schwartz, Ron Naftali, Pavel Margulis, Igor Slobodnik
  • Method of and apparatus for line alignment to compensate for static and dynamic inaccuracies in scanning
    Publication number: 20040066506
    Abstract: In a method and apparatus for compensating for static and dynamic inaccuracies in an optical scanner used in a typical surface inspection system, the scanner may have a scanning axis and a cross-scanning axis. A surface of an inspection article is scanned along a scanning axis and a scanning axis signal is output at predetermined distances along this axis. The scanning axis signal may be used to determine a speed of relative movement between the scanner and the inspection article. A jitter signal may be output whenever the scanner deviates from the scanning axis, and this signal may be used to calculate the amount of deviation. Information, such as the speed of relative movement, scan line resolution, and a scanning axis static position error may be used to generate a scan line. A generated scan line may be shifted to compensate for a cross-scanning axis error.
    Type: Application
    Filed: October 7, 2002
    Publication date: April 8, 2004
    Applicant: Applied Materials Israel Ltd
    Inventors: Rami Elichai, Gilad Schwartz, Ron Naftali, Pavel Margulis, Igor Slobodnik