Abstract: A method and system for monitoring operation of a reaction chamber for operation malfunctions. The reaction chamber includes a pressure gauge coupled therewith to collect pressure data within the reaction chamber during operation of the reaction chamber. The pressure data is received in a processor and a plurality of pressure readings are generated from the pressure data, identifying pressure changes within the reaction chamber during operation. The plurality of pressure readings are analyzed to identify an abnormal pressure change and an operating malfunction is determined when the abnormal pressure change is identified.

Abstract: A method of monitoring a microelectronic manufacturing process includes the implementation of a monitoring sensor that is configured to operate in an inter-process mode. During an inter-process mode, a first valve is opened in order to initiate transfer of a processing substrate between at least one processing chamber and a transfer chamber. The monitoring sensor is programmed to monitor the interior of the at least one processing chamber only after the first valve is opened.

Abstract: A method of monitoring a microelectronic manufacturing process includes the implementation of a process monitor that is configured to operate in an inter-process mode.