Patents by Inventor IIiya SIGAL

IIiya SIGAL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD
    Publication number: 20220082953
    Abstract: A substrate table for supporting a substrate includes a surface and coarse burls. Each of the coarse burls includes a burl-top surface and fine burls. The coarse burls are disposed on the surface of the substrate table. The fine burls are disposed on the burl-top surface. The fine burls contact the substrate when the substrate table supports the substrate.
    Type: Application
    Filed: May 5, 2020
    Publication date: March 17, 2022
    Applicants: ASML HOLDING N.V., ASML NETHERLANDS B.V.
    Inventors: Matthew LIPSON, Satish ACHANTA, Benjamin David DAWSON, Matthew Anthony SORNA, IIiya SIGAL, Tammo UITTERDIJK