Patents by Inventor Iiya Perlov

Iiya Perlov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Carrier head with a flexible membrane for a chemical mechanical polishing system
    Patent number: 6106378
    Abstract: A carrier head with a flexible member connected to a base to define a first chamber, a second chamber and a third chamber. A lower surface of the flexible member provides a substrate receiving surface with an inner portion associated with the first chamber, a substantially annular middle portion surrounding the inner portion and associated with the second chamber, and a substantially annular outer portion surrounding the middle portion and associated with the third chamber. The width of the outer portion may be significantly less than the width of the middle portion. The carrier head may also includea flange connected to a drive shaft and a gimbal pivotally connecting the flange to the base.
    Type: Grant
    Filed: August 4, 1999
    Date of Patent: August 22, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Iiya Perlov, Eugene Gantvarg, Sen-Hou Ko