Patents by Inventor Ik B. Huh

Ik B. Huh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing a phase shift mask
    Patent number: 5498497
    Abstract: A phase shift layer is formed on a transparent glass on which a Cr pattern is formed and a phase shift layer pattern self-aligned by the Cr pattern is formed so that high resolution is obtained by minimized the overlapping error and the reliability of the semiconductor device is improved.
    Type: Grant
    Filed: August 29, 1994
    Date of Patent: March 12, 1996
    Assignee: Hyundai Electronics Industries, Co., Ltd.
    Inventors: Young S. Kim, Young M. Ham, Ik B. Huh, Hung E. Kim