Patents by Inventor Ik Boum Hur

Ik Boum Hur has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and apparatus for coating photoresist film
    Patent number: 5863619
    Abstract: A method of and an apparatus for coating a photoresist film over a wafer, capable of eliminating local non-uniformity of the photoresist film and uniformly controlling the thickness of the photoresist film. The method includes the steps of vaporizing and injecting a liquid photoresist material to form photoresist particles, electrically charging photoresist particles, establishing an electric field in an area where the photoresist particles flow, thereby deflecting the photoresist particles, and selectively taking the photoresist particles passing through a desired zone, and depositing the selected photoresist particles over the wafer.
    Type: Grant
    Filed: December 18, 1995
    Date of Patent: January 26, 1999
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventor: Ik Boum Hur