Abstract: An etching method includes providing a substrate on a substrate support in a chamber of a plasma processing apparatus. The etching method further includes etching the substrate with plasma generated in the chamber, thereby forming a recess in the substrate. In the etching, an electrical bias is supplied to the substrate support, to attract ions from the plasma into the substrate. In the etching, at least one of a bias frequency, which is a reciprocal of a time length of a waveform cycle of the electrical bias, and a pulse duty ratio of a pulsed electrical bias is modified to maintain an ion energy flux to the substrate.

Abstract: A substrate processing apparatus includes a substrate stage on which a substrate is disposed, a first radio-frequency power supply configured to supply first radio-frequency power having a first frequency to the substrate stage, an impedance converter configured to convert an impedance on a load side seen from the first radio-frequency power supply into a set impedance, a second radio-frequency power supply configured to supply second radio-frequency power having a second frequency lower than the first frequency to the substrate stage, and a controller configured to control the set impedance of the impedance converter, and the controller sets the set impedance according to a substrate processing.

Abstract: A substrate processing apparatus includes a substrate stage on which a substrate is disposed, a first radio-frequency power supply configured to supply first radio-frequency power having a first frequency to the substrate stage, an impedance converter configured to convert an impedance on a load side seen from the first radio-frequency power supply into a set impedance, a second radio-frequency power supply configured to supply second radio-frequency power having a second frequency lower than the first frequency to the substrate stage, and a controller configured to control the set impedance of the impedance converter, and the controller sets the set impedance according to a substrate processing.

Abstract: Provided is a substrate processing apparatus comprising: a substrate support on which a substrate is mounted; a first radio frequency power supply that outputs first radio frequency power with a first frequency to the substrate support; a second radio frequency power supply that outputs second radio frequency power with a second frequency lower than the first frequency to the substrate support; a sensor that detects reflected waves received from the substrate support and a processor that controls the first radio frequency power supply so that an effective power, which is equal to a difference between the power of the reflected waves detected by the sensor and the output power of the first radio frequency power supply, reaches a set value.

Abstract: The objects of the present invention are to provide a surface-treated powder that is excellent in water repellency and oil repellency and provides smooth texture and good adhesion when applied to skin, to produce the surface-treated powder simply and inexpensively, and to provide cosmetics comprising the surface-treated powder. Specifically, according to the present invention, a surface-treated powder wherein the surface of a material powder is treated with perfluoropolyetherphosphate represented by general formula (1) and an anionic polymer having a perfluoropolyether chain, which is represented by general formula (2), or perfluoropolyetherphosphate represented by general formula (1) and a cationic polymer having a perfluoropolyether chain, which is represented by general formula (3), and cosmetics comprising the surface-treated powder are provided.

Abstract: The objects of the present invention are to provide a surface-treated powder that is excellent in water repellency and oil repellency and provides smooth texture and good adhesion when applied to skin, to produce the surface-treated powder simply and inexpensively, and to provide cosmetics comprising the surface-treated powder. Specifically, according to the present invention, a surface-treated powder wherein the surface of a material powder is treated with perfluoropolyetherphosphate represented by general formula (1) and an anionic polymer having a perfluoropolyether chain, which is represented by general formula (2), or perfluoropolyetherphosphate represented by general formula (1) and a cationic polymer having a perfluoropolyether chain, which is represented by general formula (3), and cosmetics comprising the surface-treated powder are provided.

Abstract: An information processing apparatus that decodes a coded stream includes a memory storing the coded stream, a decoder generating image data by decoding the coded stream stored in the memory, a memory-transfer controller controlling transfer so that the coded stream is transferred to the memory prior to timing for outputting the image data, and a decoding controller controlling decoding by the decoder so that, in the coded stream stored in the memory, a reference picture that is referred to in picture decoding is preferentially decoded.

Abstract: An information processing apparatus that decodes a coded stream includes a memory storing the coded stream, a decoder generating image data by decoding the coded stream stored in the memory, a memory-transfer controller controlling transfer so that the coded stream is transferred to the memory prior to timing for outputting the image data, and a decoding controller controlling decoding by the decoder so that, in the coded stream stored in the memory, a reference picture that is referred to in picture decoding is preferentially decoded.

Abstract: An information processing apparatus controls first and second coded streams to be output in a form in which the first and second coded streams are connected to each other. The apparatus includes an operation-input acquiring unit for acquiring an operation input representing a playback portion of both coded streams to be played back, a storage unit for storing coded streams including both coded streams, a transfer-control unit for controlling transfer, to the storage unit, of portions of both coded streams for the operation input acquired by the operation-input acquiring unit, a coded stream necessary for decoding the portions of both coded streams for the acquired operation input, a decoding unit for decoding both coded streams stored in the storage unit to generate image data, and a commanding unit for commanding an image-data output time at which the image data generated by the decoding unit is output.