Abstract: A bellows is disposed to separate a main flow path that is opened or closed by a valve member coming into contact with or moving away from a valve seat from a driving part for driving the valve member via a rod so as to surround the rod. The bellows is formed by providing ring-shaped valley portions swelling inward of a metal pipe and ring-shaped peak portions swelling outward of the metal pipe alternately and continuously in a peripheral wall of the metal pipe in the axial direction of the metal pipe. Valley R/peak R, which is the ratio of valley R to peak R, is in the range of 1.15 to 1.70, where valley R is the radius of curvature of the valley portions in cross section, and peak R is the radius of curvature of the peak portions in cross section.

Abstract: A bellows is disposed to separate a main flow path that is opened or closed by a valve member coming into contact with or moving away from a valve seat from a driving part for driving the valve member via a rod so as to surround the rod. The bellows is formed by providing ring-shaped valley portions swelling inward of a metal pipe and ring-shaped peak portions swelling outward of the metal pipe alternately and continuously in a peripheral wall of the metal pipe in the axial direction of the metal pipe. Valley R/peak R, which is the ratio of valley R to peak R, is in the range of 1.15 to 1.70, where valley R is the radius of curvature of the valley portions in cross section, and peak R is the radius of curvature of the peak portions in cross section.

Abstract: The two-port valve comprises a main valve part which includes a valve seat disposed in the flow path, a valve element for opening and closing the flow path, and a rod coupled with the valve element and inserted into a through hole of a bonnet, and an operation part for driving the rod. The protection structure is provided in the two-port valve for protecting the rod seal member for the through hole from the fluid containing a depositional material. The protection structure includes ring-shaped abutting seal surfaces disposed in a wide area between a peripheral part of the valve element and an outer periphery of the rod for preventing the invasion of the fluid in a state of opening the valve. A ring-shaped elastic seal member is disposed on an inner end of the abutting seal surface.

Abstract: A vacuum regulating valve has a poppet type valve element supported so as to be brought into uniformly close contact with a valve seat disposed in a passage connecting two main ports. The valve element is connected to a valve stem by a connecting mechanism that allows the valve element to tilt relative to the valve stem. A piston included in a cylinder actuator moves the valve stem axially.

Abstract: The two-port valve comprises a main valve part which includes a valve seat disposed in the flow path, a valve element for opening and closing the flow path, and a rod coupled with the valve element and inserted into a through hole of a bonnet, and an operation part for driving the rod. The protection structure is provided in the two-port valve for protecting the rod seal member for the through hole from the fluid containing a depositional material. The protection structure includes ring-shaped abutting seal surfaces disposed in a wide area between a peripheral part of the valve element and an outer periphery of the rod for preventing the invasion of the fluid in a state of opening the valve. A ring-shaped elastic seal member is disposed on an inner end of the abutting seal surface.

Abstract: A vacuum regulating valve has a poppet type valve element supported so as to be brought into uniformly close contact with a valve seat disposed in a passage connecting two main ports. The valve element is connected to a valve stem by a connecting mechanism that allows the valve element to tilt relative to the valve stem. A piston included in a cylinder actuator moves the valve stem axially.

Abstract: A cylindrical heat-generating member is disposed in a valve casing including a valve seat in a flow path connecting main ports, a valve member for opening and closing the valve seat, and a rod connecting the valve member and a piston. A first heater is mounted in the heat-generating member. The heat-generating member and a heat receiving member of the valve member are connected to each other by a heat-transfer member for expansion and contraction. As a result, the valve member is constantly heated through the heat-transfer member irrespective of its open/closed position. When the valve member is open, the heat receiving member comes in contact with the heat-generating member and the valve member is directly heated.

Abstract: To constitute a poppet valve with a heater by providing a heater which heats a valve member at a fixed position inside valve casing without attaching the heater to the valve member, a rod or the like which is a movable member as necessary. In a valve casing 1 having main ports 11, 12, a flow path 13 which connects these main ports 11, 12, a valve seat 14 which is provided inside the flow path 13, a valve member 17 which opens/closes the valve seat 14, and a rod 18 which is coupled to the valve member 17, a cylindrical heat transfer body 28 is disposed at a fixed position therein so as to surround the rod 18, and the heat transfer body 28 is caused to house a first heater 31 therein, so that a poppet valve is constituted such that the valve member 17 comes in contact with the heat transfer body 28 at a time of opening of the valve member 17.

Abstract: A cylindrical heat-generating member is disposed in a valve casing including a valve seat in a flow path connecting main ports, a valve member for opening and closing the valve seat, and a rod connecting the valve member and a piston. A first heater is mounted in the heat-generating member. The heat-generating member and a heat receiving member of the valve member are connected to each other by a heat-transfer member for expansion and contraction. As a result, the valve member is constantly heated through the heat-transfer member irrespective of its open/closed position. When the valve member is open, the heat receiving member comes in contact with the heat-generating member and the valve member is directly heated.

Abstract: To constitute a poppet valve with a heater by providing a heater which heats a valve member at a fixed position inside valve casing without attaching the heater to the valve member, a rod or the like which is a movable member as necessary. In a valve casing 1 having main ports 11, 12, a flow path 13 which connects these main ports 11, 12, a valve seat 14 which is provided inside the flow path 13, a valve member 17 which opens/closes the valve seat 14, and a rod 18 which is coupled to the valve member 17, a cylindrical heat transfer body 28 is disposed at a fixed position therein so as to surround the rod 18, and the heat transfer body 28 is caused to house a first heater 31 therein, so that a poppet valve is constituted such that the valve member 17 comes in contact with the heat transfer body 28 at a time of opening of the valve member 17.

Abstract: A gate 3 for opening and closing an opening 2 of a chamber 1 is fixed to a top end of an arm 7 swung between a position facing the opening and a retreating position on the side thereof. A base end of the arm 7 is supported by an output shaft 10 of a fluid pressure cylinder 8 driven in parallel with a direction in which the gate comes into contact with and is separated from the opening 2, and a cam follower 12 fit in a guide groove 14 of a machine frame 6 is provided at the base end of the arm 7. The guide groove is formed by an axial-direction groove 14a for carrying the gate 3 at the position facing the opening 2 and then moving it when the gate is located at a position in the vicinity of the opening of the chamber 1, and a slant-periphery direction groove 14b connected thereto for retreating the gate to the side of the opening.

Abstract: A gate valve is disclosed comprising an elevatable lever member connected to a piston rod, a displacement member for making up and down movements integrally with the lever member and being tiltably disposed about supporting rollers acting as a pivot point or fulcrum at an end position of displacement, spring members interveningly disposed between the lever member and the displacement member, pin members fixed into side surfaces of the lever member, and engaging grooves formed in side surfaces of the displacement member and engaging with the pin members.

Abstract: A smooth vent valve in which an on-off valve and a flow control valve are provided in series and arranged to be capable of being operated by respective actuating mechanisms, thereby accurately performing the on-off operation of the on-off valve and the flow rate control of the flow control valve. The smooth vent valve (11) has an on-off valve (8) and a flow control valve (9), which are coaxially provided between an inlet port (18) and outlet port (19) of a valve body (13 to 15). The on-off valve (8) and the flow control valve (9) are placed in series. An actuating mechanism for the on-off valve (8) and an actuating mechanism for the flow control valve (9) are formed separately from each other. When the on-off valve is in an open position, the flow control valve can be switched between a throttling position and an open position while continuously changing the flow rate.