Abstract: An auxiliary heat-insulating jig is provided between a wafer boat and a heat-insulating jig. The auxiliary heat-insulating jig comprises a plurality of vertically arranged plate insulators. The plate insulators are made of opaque quartz. Thus, an auxiliary heat-insulating jig necessary for modifying a high-speed temperature-control heat treatment apparatus of an intermediate temperature specification to a high-speed temperature-control heat treatment apparatus of a high-temperature specification is provided.

Abstract: An auxiliary heat-insulating jig is provided between a wafer boat and a heat-insulating jig. The auxiliary heat-insulating jig comprises a plurality of vertically arranged plate insulators. The plate insulators are made of opaque quartz. Thus, an auxiliary heat-insulating jig necessary for modifying a high-speed temperature-control heat treatment apparatus of an intermediate temperature specification to a high-speed temperature-control heat treatment apparatus of a high-temperature specification is provided.

Abstract: A plurality of jetting outlets having a jetting outlet shape of a Vincent Bach curve are disposed in a jetting part of a heat-treatment apparatus. An oxygen pipe, an air pipe, and an argon pipe are connected to the jetting part. A wafer supplied into a reaction tube is warmed and subjected to a heat treatment at a predetermined temperature. Thereafter, in cooling the wafer, a cooling gas containing oxygen is introduced from the jetting part into the reaction tube after the wafer is cooled to a predetermined temperature, whereby the wafer is further cooled. This restrains exfoliation of the film formed on the wafer.

Abstract: There is provided a retainer for use in heat treatment of a substrate which enables an increase in the accuracy of flatness of support sections for supporting a substrate. The retainer includes silicon wafer support sections for supporting a plurality of substrates by means of surface contact, and spacers for defining intervals of the silicon wafer support sections with respect to a vertical direction. Since the support sections and the spacers can be manufactured separately from each other, the accuracy of flatness of the support sections and intervals between the support sections with respect to the vertical direction are determined by the accuracy of individual support sections and spacers. So long as initial accuracy of support sections and that of spacers are maintained, a high-precision retainer can be obtained.