Abstract: A useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material, wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following fluorine atom-containing unit (1), wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group.

Abstract: To provide a spatial optical modulation element having a long life free from a deterioration of optical modulation characteristics even if a high power laser beam with an ultra-short pulse is used as a modulation drive light. A spatial optical modulation element 1 wherein disposed between a prism 2 and an optical functional material layer 3 made of an optical functional material with the refractive index changeable by light irradiation, is a low refractive index layer 4 made of a transparent material with a refractive index lower than the refractive index of the dielectric. A spatial optical modulation method characterized in that using such a spatial optical modulation element 1, at the interface between the prism and the low refractive index layer, reflection of a to-be-modulated light 5 entering through the prism, is controlled by a modulation drive light 6.

Abstract: A pellicle which is excellent in transmittance and durability against short wavelength light, and which can be used for photolithography by using e.g. a KrF excimer laser, is provided. A pellicle for exposure to a light having a wavelength of at most 200 nm, which comprises a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane and/or the adhesive comprises a polymer containing repeating units represented by the following formula (1): wherein Q represents a C1-3 polyfluoroalkylene group having a linear structure, or a group having at least one atom selected from hydrogen atoms and fluorine atoms in such a polyfluoroalkylene group substituted by a substituent comprising a polyfluoroalkyl group which may contain an ethereal oxygen atom, or the like, and X represents a hydrogen atom, a fluorine atom or a C1-3 polyfluoroalkyl group which may contain an ethereal oxygen atom.

Abstract: To provide a spatial optical modulation element having a long life free from a deterioration of optical modulation characteristics even if a high power laser beam with an ultra-short pulse is used as a modulation drive light, and having a high response speed when e.g. a light having a wavelength of 1.55 ?m is used. A spatial optical modulation element wherein disposed between a prism 2 and an optical functional material layer 3 made of an optical functional material with the complex index of refraction changeable by light irradiation, is a low refractive index layer 4 made of a transparent material with a refractive index lower than the refractive index of the prism 2, and carbon nanotubes are used as the optical function material.

Abstract: It is to provide a useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material. A pellicle wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following unit (1). The unit (1) is a unit containing a fluorine atom, wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group.

Abstract: To provide a spatial optical modulation element having a long life free from a deterioration of optical modulation characteristics even if a high power laser beam with an ultra-short pulse is used as a modulation drive light, and having a high response speed when e.g. a light having a wavelength of 1.55 ?m is used. A spatial optical modulation element wherein disposed between a prism 2 and an optical functional material layer 3 made of an optical functional material with the complex index of refraction changeable by light irradiation, is a low refractive index layer 4 made of a transparent material with a refractive index lower than the refractive index of the prism 2, and carbon nanotubes are used as the optical function material.

Abstract: To provide a spatial optical modulation element having a long life free from a deterioration of optical modulation characteristics even if a high power laser beam with an ultra-short pulse is used as a modulation drive light. A spatial optical modulation element 1 wherein disposed between a prism 2 and an optical functional material layer 3 made of an optical functional material with the refractive index changeable by light irradiation, is a low refractive index layer 4 made of a transparent material with a refractive index lower than the refractive index of the dielectric. A spatial optical modulation method characterized in that using such a spatial optical modulation element 1, at the interface between the prism and the low refractive index layer, reflection of a to-be-modulated light 5 entering through the prism, is controlled by a modulation drive light 6.

Abstract: A pellicle is used for a photolithographic patterning process using a light having a wavelength of from 100 to 200 nm. The pellicle contains a pellicle membrane containing (A) a substantially linear fluoropolymer which has an alicyclic structure in its main chain, the main chain being a chain of carbon atoms, and the fluropolymer satisfying the following requirements (1) the carbon atoms in the main chain of the fluoropolymer contain a carbon atom having at least one hydrogen atom bonded thereto and a carbon atom having no hydrogen atom bonded thereto; and (2) in the measurement of a high resolution proton magnetic resonance spectrum of the fluoropolymer, a number of hydrogen atoms based on signals appearing on the higher magnetic field side higher than 2.8 ppm, is at most 6 mol % based on a total number of hydrogen atoms.

Abstract: A pellicle which is excellent in transmittance and durability against short wavelength light, and which can be used for photolithography by using e.g. a KrF excimer laser, is provided. A pellicle for exposure to a light having a wavelength of at most 200 nm, which comprises a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane and/or the adhesive comprises a polymer containing repeating units represented by the following formula (1): wherein Q represents a C1-3 polyfluoroalkylene group having a linear structure, or a group having at least one atom selected from hydrogen atoms and fluorine atoms in such a polyfluoroalkylene group substituted by a substituent comprising a polyfluoroalkyl group which may contain an ethereal oxygen atom, or the like, and X represents a hydrogen atom, a fluorine atom or a C1-3 polyfluoroalkyl group which may contain an ethereal oxygen atom.

Abstract: A pellicle for a photolithographic patterning process by means of a light having a wavelength of from 100 to 200 nm, which has a pellicle membrane made of the following fluoropolymer (A):

Abstract: A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A):

Abstract: A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A): fluorine-containing polymer (A): a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.

Abstract: A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A):

Abstract: An optical waveguide provided on a substrate, which comprises a core for transmitting light and a clad formed around the core, wherein the clad is made of a fluorinated alicyclic structure-containing polymer having functional groups.

Abstract: A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A): fluorine-containing polymer (A): a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.

Abstract: An optical waveguide provided on a substrate, which comprises a core for transmitting light and a clad formed around the core, wherein the clad is made of a fluorinated alicyclic structure-containing polymer having functional groups.

Abstract: An optical waveguide provided on a substrate, which comprises a core for transmitting light and a clad formed around the core, wherein the clad is made of a fluorinated alicyclic structure-containing polymer having functional groups.

Abstract: A fluorine-containing polymer composition comprising a fluorine-containing solvent of the formula R1—O—R2 wherein R1 is a C5-12 linear or branched polyfluoroalkyl group which may have an ether bond, and R2 is a C1-5 linear or branched alkyl group, and a fluorine-containing amorphous polymer having a fluorine-containing ring structure in its main chain, dissolved in the solvent.

Abstract: A fluorine-containing polymer composition comprising a fluorine-containing solvent of the formula R1—O—R2 wherein R1 is a C5-12 linear or branched polyfluoroalkyl group which may have an ether bond, and R2 is a C1-5 linear or branched alkyl group, and a fluorine-containing amorphous polymer having a fluorine-containing ring structure in its main chain, dissolved in the solvent.

Abstract: An optical waveguide provided on a substrate, which comprises a core for transmitting light and a clad formed around the core, wherein the clad is made of a fluorinated alicyclic structure-containing polymer having functional groups.