Abstract: To easily decide parameters of a model structure of a controlled object suitable for non-interference control. Parameters K and T of a model structure (A structure) comprising a plurality of inputs and a plurality of outputs, wherein a difference on the output side is fed back to the input side, are calculated based on parameters a and b of a black box model (P structure) calculated through system identification or the like in accordance with predetermined conversion expressions K=f(a,b) and T=f(a,b).

Abstract: A temperature control system has a plurality of heaters arranged on a control target in a plurality of rows and columns, heaters of the same row being connected to a common wiring and heaters of the same column being connected to a common wiring, wirings of the rows being connected to a side of one pole of a power source via respective elements that respond to a heater firing instruction, and wirings of the columns being connected to a side of the other pole of the power source via respective elements that respond to a heater firing instruction, and a controller that controls driving of the plurality of heaters based on an operation amount that is input for controlling a temperature of the control target.

Abstract: A customer submits a service application by accessing the home page of a service provider through a personal computer 3, and transmits the data including the operation amount and the control amount of a temperature controller 4 to a server 2 of the service provider. The server 2 accumulates the received data, and in accordance with the contents of the received service application, processes the accumulated data and provides the services of calculating the control parameter for the temperature controller 4, producing a model of the object of control and making a diagnosis by checking for a temperature control fault.

Abstract: The number of wirings and the number of switching elements are decreased in a heater, a sensor, and the like. First to ninth heaters that heat a hot plate are connected into a matrix form between first power lines in a row direction and second power lines in a column direction. The first power lines are connected to one end of a power supply through three switching elements, respectively. The second power lines are connected to the other end of the power supply through three switching elements, respectively. On-off control is performed to the switching elements to select the heater to be driven. Therefore, the number of power lines and the number of switching elements are decreased compared with a conventional technique in which the heaters are separately wired.

Abstract: A temperature variation of a glass substrate 2 at a plurality of measuring points in a continuous furnace 3 when preset temperatures of respective furnaces 31-33 are changed is estimated in the form of a matrix based on a model, an inverse matrix of the matrix is used so as to calculate correction values in such manner that a temperature of the glass substrate 2 corresponds to a temperature of a desired temperature profile, and the preset temperatures are corrected based on the correction values.

Abstract: When a work is set on a hot plate and a heat treatment is started and the like, an addition waveform of a target temperature is formed based on a previously formed data of an adjustment value, and a temperature is controlled by adding the addition waveform to the target temperature SP, and with the data of the adjustment value, the variation in temperature of the work is prevented using an interference matrix showing a relation between the target temperature SP and the temperature of the work.

Abstract: [Problem] To easily decide parameters of a model structure of a controlled object suitable for non-interference control. [Means for Solving Problems] Parameters K and T of a model structure (A structure) comprising a plurality of inputs and a plurality of outputs, wherein a difference on the output side is fed back to the input side, are calculated based on parameters a and b of a black box model (P structure) calculated through system identification or the like in accordance with predetermined conversion expressions K=f(a,b) and T=f(a,b).

Abstract: In a method of controlling the temperature of a target object by measuring to obtain detected temperatures at a plurality of measurement positions and controlling a processing device such as a heater such that each detected temperature will match the corresponding one of target temperatures set for the processing device, a preliminary step is taken to determine the degrees of interference at the measurement positions by varying the target temperatures and the degrees of interference thus determined are used to correct the set target temperatures or the detected temperatures.

Abstract: A target value processing unit, includes: an input section to which a target value signal showing a target value of a control process is inputted; a target value shaping unit shaping the target value signal inputted to the input section, into a signal form which is proper for a control treatment of a regulator implementing the control process; and an output section outputting to the regulator a shaped target value signal which is shaped by the target value shaping unit. The target value processing unit realizes the high-level control process without improving the regulator.

Abstract: When a work is set on a hot plate and a heat treatment is started and the like, an addition waveform of a target temperature is formed based on a previously formed data of an adjustment value, and a temperature is controlled by adding the addition waveform to the target temperature SP, and with the data of the adjustment value, the variation in temperature of the work is prevented using an interference matrix showing a relation between the target temperature SP and the temperature of the work.

Abstract: The invention is configured such that a distance estimation device estimates a distance between a hot plate as an object to be treated and a work, with respect to which the work is placed to be thermally treated, based upon information on temperature of the hot plate such as an absolute value of inclination of the temperature of the hot plate, and a determination device compares the estimated distance with a threshold to determine the presence or absence of abnormality.

Abstract: A temperature variation of a glass substrate 2 at a plurality of measuring points in a continuous furnace 3 when preset temperatures of respective furnaces 31-33 are changed is estimated in the form of a matrix based on a model, an inverse matrix of the matrix is used so as to calculate correction values in such manner that a temperature of the glass substrate 2 corresponds to a temperature of a desired temperature profile, and the preset temperatures are corrected based on the correction values.

Abstract: In a method of controlling the temperature of a target object by measuring to obtain detected temperatures at a plurality of measurement positions and controlling a processing device such as a heater such that each detected temperature will match the corresponding one of target temperatures set for the processing device, a preliminary step is taken to determine the degrees of interference at the measurement positions by varying the target temperatures and the degrees of interference thus determined are used to correct the set target temperatures or the detected temperatures.

Abstract: A plurality of individually corresponding heaters and temperature sensors are provided along with a plurality of a PID control means. An average temperature/gradient temperature calculating means calculates the average temperatures of the temperatures measured by the temperature sensors and the gradient temperatures based on the measured temperatures. Each of the PID control means outputs an operation signal so that the average temperatures or gradient temperatures may be made equal to the desired values. A distributing means distributes the operation signal from each of the PID control means to each heater so that control by the PID control means may produce no effect on the control of the other PID control means.

Abstract: A target value processing unit, includes: an input section to which a target value signal showing a target value of a control process is inputted; a target value shaping unit shaping the target value signal inputted to the input section, into a signal form which is proper for a control treatment of a regulator implementing the control process; and an output section outputting to the regulator a shaped target value signal which is shaped by the target value shaping unit. The target value processing unit realizes the high-level control process without improving the regulator.

Abstract: A customer submits a service application by accessing the home page of a service provider through a personal computer 3, and transmits the data including the operation amount and the control amount of a temperature controller 4 to a server 2 of the service provider. The server 2 accumulates the received data, and in accordance with the contents of the received service application, processes the accumulated data and provides the services of calculating the control parameter for the temperature controller 4, producing a model of the object of control and making a diagnosis by checking for a temperature control fault.

Abstract: A controller controls a physical variable such as temperature of a controlled system. A variable calculator calculates and output a manipulated variable on the controlled system based on of a target value such as a target temperature and a feedback value such as the measured temperature of the controlled system. A dead-time compensator provides a dead-time compensated output using a model simulating the controlled system having a dead time and an idealized model having no dead time, based on the manipulated variable outputted from the variable calculator to carry out an ordinary control and a dead-time compensated control. A switch functions to select the dead-time compensated control by providing a dead-time compensated output to the variable calculator or an ordinary control providing no dead-time compensated output to the variable calculator. The dead-time compensated control is carried out at least during set point response of the controller.

Abstract: A plurality of individually corresponding heaters and temperature sensors are provided along with a plurality of a PID control means. An average temperature/gradient temperature calculating means calculates the average temperatures of the temperatures measured by the temperature sensors and the gradient temperatures based on the measured temperatures. Each of the PID control means outputs an operation signal so that the average temperatures or gradient temperatures may be made equal to the desired values. A distributing means distributes the operation signal from each of the PID control means to each heater so that control by the PID control means may produce no effect on the control of the other PID control means.

Abstract: A controller controls a physical variable such as temperature of a controlled system. A variable calculator calculates and output a manipulated variable on the controlled system based on of a target value such as a target temperature and a feedback value such as the measured temperature of the controlled system. A dead-time compensator provides a dead-time compensated output using a model simulating the controlled system having a dead time and an idealized model having no dead time, based on the manipulated variable outputted from the variable calculator to carry out an ordinary control and a dead-time compensated control. A switch functions to select the dead-time compensated control by providing a dead-time compensated output to the variable calculator or an ordinary control providing no dead-time compensated output to the variable calculator. The dead-time compensated control is carried out at least during set point response of the controller.

Abstract: A device to prevent reverse current flow includes a diode connected between a power supply and a load. A switching device, connected in parallel with the diode, has a power loss that is smaller than that of the diode. A low-loss current detector, arranged to turn the switching device on and off, includes a DC current detector and a comparator. The comparator compares the detected DC current value with a threshold value for an operating current and generates an output signal that determines when the switching device should be turned on or off.