Abstract: To provide a photo detection device and a manufacturing method thereof, the photo detection device comprising a SPAD in which a substrate-manufacturing cost is kept sufficiently low compared to InGaAs, afterpulsing is less and DCR is also reduced. A photo detection device detecting an incident light from an object, comprising: (i) a P-type silicon (Si) substrate; (ii) a P-type germanium (Ge) layer formed by epitaxial growth on a first surface serving as a front surface of the P-type silicon (Si) substrate; and (iii) a P-type thin film silicon (Si) layer formed on the P-type germanium (Ge) layer, (iv) wherein the P-type thin film silicon (Si) layer is divided into a first region and a second region by a Shallow Trench Isolation (STI), multiple single photon avalanche diodes (SPADs) arranged in an array are formed in the first region, and a CMOS transistor circuit driving the SPADs is formed in the second region.

Abstract: Provided is a method of manufacturing a microneedle array in which an active ingredient is concentrated at a tip while an active ingredient content is guaranteed. In order to achieve the object, a method of manufacturing a microneedle array in which needle-like recessed portions of a mold are filled with a liquid to form one dose of a patch includes determining a filling amount of the liquid from a difference in mass of the mold before and after filling of the liquid, determining a filling state of the liquid in the mold filled with the liquid, sucking the mold in which the filling amount and the filling state of the liquid are determined to be normal from a rear face, and evaporating and drying a solvent of the liquid of the sucked mold.

Abstract: Provided are a mold case that prevents deformation of a microneedle array, and a manufacturing method of a microneedle array. The problems are solved by the manufacturing method of a microneedle array including: a filling step of filling needle-like recessed portions of a mold having flexibility and having a plurality of the needle-like recessed portions on a front surface, with a liquid material; and a drying step of drying the liquid material in a state where the mold filled with the liquid material is stored in the mold case which causes an edge portion of the mold to be sandwiched between the lid and the pedestal.

Abstract: Provided is a method for manufacturing a microneedle array in which the distal end of a needle-like recessed portion is reliably filled with a drug solution. The problem is solved by a method for manufacturing a microneedle array, including: a positioning adjustment step of adjusting positioning of a mold having a needle-like recessed portion on a front surface, and a drug solution ejection nozzle which ejects a drug solution; a relative movement step of moving the mold and the drug solution ejection nozzle relative to each other to cause a position of the needle-like recessed portion and a position of the drug solution ejection nozzle to coincide with each other in a plan view in a direction parallel to an ejection direction of the drug solution; an ejection step of ejecting the drug solution from the drug solution ejection nozzle toward the needle-like recessed portion; and a suction step of suctioning a rear surface of the mold.

Abstract: Provided is a manufacturing method of a microneedle array capable of closing a needle-like recessed portion with a drug solution and providing a high yield.

Abstract: Provided is a method of manufacturing a microneedle array in which an active ingredient is concentrated at a tip while an active ingredient content is guaranteed. In order to achieve the object, a method of manufacturing a microneedle array in which needle-like recessed portions of a mold are filled with a liquid to form one dose of a patch includes determining a filling amount of the liquid from a difference in mass of the mold before and after filling of the liquid, determining a filling state of the liquid in the mold filled with the liquid, sucking the mold in which the filling amount and the filling state of the liquid are determined to be normal from a rear face, and evaporating and drying a solvent of the liquid of the sucked mold.

Abstract: Provided are a mold case that prevents deformation of a microneedle array, and a manufacturing method of a microneedle array. The problems are solved by the manufacturing method of a microneedle array including: a filling step of filling needle-like recessed portions of a mold having flexibility and having a plurality of the needle-like recessed portions on a front surface, with a liquid material; and a drying step of drying the liquid material in a state where the mold filled with the liquid material is stored in the mold case which causes an edge portion of the mold to be sandwiched between the lid and the pedestal.

Abstract: Provided is a manufacturing method of a sheet having needle-like protrusions capable of individually manufacturing sheets on a mold. The manufacturing method of a sheet having needle-like protrusions includes, for a mold provided with needle-like recesses and an annular groove provided around a region where the needle-like recesses are formed, a first polymer solution supplying step of supplying a first polymer solution, which is to become a first layer, to the needle-like recesses; a second polymer solution supplying step of filling the needle-like recesses and the groove with a second polymer solution by supplying the second polymer solution, which is to become a second layer, to a surface of the mold; a drying step of forming a laminate of the first layer and the second layer by drying the first polymer solution and the second polymer solution; and a peeling step of peeling the laminate away from the mold.

Abstract: A method of producing a transdermal absorption sheet includes a preparatory step of forming the sheet portion in advance by drying and solidifying a base solution in a thin film state, a drug solution arrangement step of arranging a drug solution on a surface of a mold having needle-like recessed portions, a drug solution filling step of filling the needle-like recessed portions with the drug solution while pressingly expanding the drug solution on the surface of the mold by pressing the drug solution on the surface of the mold to the surface of the mold with the sheet portion, a drying step of drying an undried drug solution filling the needle-like recessed portions with the sheet portion to form needle-like protruding portions on a lower surface of the sheet portion, and a peeling-off step of peeling off the sheet portion and the needle-like protruding portions from the mold.

Abstract: A method for developing a non chemically amplified resist employs a developing fluid having a carboxylic acid compound, which is a carboxylic acid ester having branched chain alkyl groups and a total carbon number of 8 or greater, as a main component. It is particularly preferable for the carboxylic acid compound to be at least one of isobutyl butyrate, butyl isobutyrate, isobutyl isobutyrate, isoamyl isobutyrate, and 2-methylbutyrate 2-methylbutyl. It is also preferable for the non chemically amplified resist to be a resist having a copolymer of an ?-chloroacrylate ester compound and an ?-methylstyrene compound as a main component.

Abstract: A method for developing a non chemically amplified resist employs a developing fluid having a carboxylic acid compound, which is a carboxylic acid ester having branched chain alkyl groups and a total carbon number of 8 or greater, as a main component. It is particularly preferable for the carboxylic acid compound to be at least one of isobutyl butyrate, butyl isobutyrate, isobutyl isobutyrate, isoamyl isobutyrate, and 2-methylbutyrate 2-methylbutyl. It is also preferable for the non chemically amplified resist to be a resist having a copolymer of an ?-chloroacrylate ester compound and an ?-methylstyrene compound as a main component.

Abstract: An electron beam writing method for writing a fine pattern that includes servo patterns and groove patterns, the method including the step of adjusting an exposure amount of the resist by changing, when controlling application timing of the electron beam by an ON/OFF signal to a blanking unit that blocks the electron beam, an application duty ratio of the electron beam by the ON/OFF signal with respect to each writing radius position for each pattern based on sensitivity variation data of the resist with respect to post exposure delay for each pattern.

Abstract: Irradiation of an electron beam onto a base plate having resist coated thereon is controlled by ON/OFF signals output to a blanking element. Beam deflecting operations are controlled by deflecting signals output to a deflecting element. Patterns of servo areas and data areas are scanned and drawn on the base plate over a plurality of rotations. The electron beam is scanned in two directions so as to fill the shapes of patterns in the servo areas during a specific rotation, patterns in the data area are drawn as a continuous line or broken line with a single electron beam emission. The patterns of the data area are not drawn during other rotations, by shielding irradiation of the electron beam.

Abstract: Fine patterns to be formed on recording media such as DTM or BPM are drawn onto a mold original plate, on which resist is coated, by scanning an electron beam with an electron beam lithography apparatus. At this time, at least two types of patterns from among a group of: first patterns of protrusions and recesses constituted by media servo patterns and group patterns among data tracks; second patterns of protrusions and recesses constituted by annular positioning marks formed along the circumference of the mold as annular patterns and product identifying marks for tracing products; and third patterns of protrusions and recesses constituted by point like orientation marks used during transfer from the mold to the recording media are continuously drawn onto a single mold original plate within a single vacuum chamber by electron beam lithography.

Abstract: A circuit breaker operating apparatus is provided which includes a frame, a rotatable closing shaft attached to the frame, a first member disposed on one end of the closing shaft for rotating the closing shaft only in one direction, a second member disposed on the other end of the closing shaft for rotating the closing shaft only in the same direction as the first member rotates, and alternately with the first member and a closing cam fixedly secured to the closing shaft which rotates pivotally about the closing shaft in the same direction as the closing shaft rotates. The circuit breaker operating apparatus also includes a spring member provided with one end fixedly secured to the frame, the other end, to the closing cam respectively. The closing cam rotates for charging closing energy into the spring member, and rotates also for discharging the closing energy charged within the spring member after having rotated in a specified constant angle.

Abstract: An operating mechanism for use in a circuit breaker having a stationary contact and a moving contact which is turned on (closed) or off (tripped open) by using the accumulated energy of a stretched spring, the operating mechanism having a frame, a main shaft having a closing cam and an additional cam, a four-joint crank for actuating the moving contact in accordance with the movement of the main cam, a roller clutch mounted around the shaft, a bearing fitting member having an opening mounted around the roller clutch, a gear member having a stud adapted to fit within the opening of the fitting member, and an electric motor and a manually operable handle to drive the spring to accumulate energy.