Abstract: This foreign material removing device for removing a foreign material adhered to a substrate is provided with: a jetting unit that jets a gas toward a substrate portion having a width smaller than the full width of the substrate; a foreign material suction unit that sucks, with the foreign material, the gas jetted toward the substrate from the jetting unit; and a covering body that covers the portion to which the gas is to be jetted by means of the jetting unit.

Abstract: This foreign material removing device for removing a foreign material adhered to a substrate is provided with: a jetting unit that jets a gas toward a substrate portion having a width smaller than the full width of the substrate; a foreign material suction unit that sucks, with the foreign material, the gas jetted toward the substrate from the jetting unit; and a covering body that covers the portion to which the gas is to be jetted by means of the jetting unit.

Abstract: A method of manufacturing a liquid crystal panel according to the present invention includes the steps of providing a marking pad including a marking region formed of a stack constituted only of a metal film serving as a lower layer and an ITO film serving as an upper layer on a main surface of a glass substrate, bonding a glass substrate to the glass substrate so as to be opposed to the main surface of the marking region in the marking pad at a distance therefrom, and providing marking by providing a through hole in the marking region in the marking pad by irradiating the marking region in the marking pad with laser beams through the glass substrate. Thus, the marking pad provided on the glass substrate for the liquid crystal panel can be provided with marking of high definition even though laser beams are emitted through another glass substrate for a liquid crystal panel paired with the glass substrate for the liquid crystal panel.

Abstract: A method of manufacturing a liquid crystal panel includes the steps of simultaneously forming a gate electrode of a TFT and a lower layer of a marking pad, simultaneously forming a gate insulating film of the TFT and a protective insulating film covering the lower layer, performing various film deposition processes and patterning processes while the lower layer is covered with the protective insulating film, exposing a main surface of the lower layer except for its periphery by removing at least a part of the protective insulating film, simultaneously forming a pixel electrode and an upper layer of the marking pad covering the main surface of the lower layer in a portion not covered with the protective insulating film, and providing marking by providing a through hole by irradiating the marking pad with laser beams.

Abstract: A method of manufacturing a liquid crystal panel according to the present invention includes the steps of providing a marking pad including a marking region formed of a stack constituted only of a metal film serving as a lower layer and an ITO film serving as an upper layer on a main surface of a glass substrate, bonding a glass substrate to the glass substrate so as to be opposed to the main surface of the marking region in the marking pad at a distance therefrom, and providing marking by providing a through hole in the marking region in the marking pad by irradiating the marking region in the marking pad with laser beams through the glass substrate. Thus, the marking pad provided on the glass substrate for the liquid crystal panel can be provided with marking of high definition even though laser beams are emitted through another glass substrate for a liquid crystal panel paired with the glass substrate for the liquid crystal panel.

Abstract: A method of manufacturing a liquid crystal panel according to the present invention includes the steps of simultaneously forming a gate electrode of a TFT and a lower layer of a marking pad, simultaneously forming a gate insulating film of the TFT and a protective insulating film covering the lower layer, performing various film deposition processes and patterning processes while the lower layer is covered with the protective insulating film, exposing a main surface of the lower layer except for its periphery by removing at least a part of the protective insulating film, simultaneously forming a pixel electrode and an upper layer of the marking pad covering the main surface of the lower layer in a portion not covered with the protective insulating film, and providing marking by providing a through hole by irradiating the marking pad with laser beams. Thus, the marking pad including a metal film provided on a glass substrate for a liquid crystal panel can be prevented from corroding in a production process.