Abstract: An exemplary embodiment relates to improving a driving speed of a shape-memory-alloy applied as an artificial muscle, and to improving heat conduction and thermal convection by growing copper nanowires on the surface of the shape-memory-alloy to improve a natural cooling rate and a driving speed of the shape-memory-alloy.

Abstract: The present invention relates to an apparatus and method for forming a silicon nitride film by performing plasma enhanced atomic layer deposition (PE-ALD) employing very high frequency (VHF). An atomic layer deposition apparatus according to an embodiment of the present invention may comprise: a chamber providing a space in which a process is performed; a substrate support unit for supporting a substrate in the chamber; a gas supply unit for supplying gas to the chamber; an exhaust unit for discharging gas in the chamber; a plasma generation unit installed in the chamber to generate plasma in the chamber; and a VHF (very high frequency) power source for applying a VHF band signal to the plasma generation unit.

Abstract: An exemplary embodiment relates to improving a driving speed of a shape-memory-alloy applied as an artificial muscle, and to improving heat conduction and thermal convection by growing copper nanowires on the surface of the shape-memory-alloy to improve a natural cooling rate and a driving speed of the shape-memory-alloy.

Abstract: Improved selective atomic layer deposition of metal oxides is provided that has large-ligand (i.e., molecular weight >20) metal precursors. A small molecule inhibitor on non-growth surfaces is used to distinguish growth surfaces from non-growth surfaces. This approach does not rely on formation of a self-assembled monolayer on the non-growth surfaces.

Abstract: Advanced precursors for selective atomic layer deposition (ALD) of aluminum oxide (Al2O3) using self-assembled monolayers (SAM) are provided. Area selective atomic layer deposition (AS-ALD) is a highly sought-after strategy for the fabrication of next-generation electronics. Embodiments described herein provide a process of selective ALD of Al2O3 that achieves an excellent selectivity between an SAM-coated surface and non-coated surface by adopting one of several novel ALD precursors. Some embodiments further optimize process parameters (e.g., growth temperature, precursor partial pressure, precursor dosing time, purging time, reactant dosing time, and number of cycles) to further improve selectivity of the ALD precursor.

Abstract: A method for manufacturing a reinforced composite polymer electrolyte comprises: manufacturing a porous thin film, impregnating the porous thin film with an electrolyte, and irradiating the impregnated porous thin film with ultraviolet rays. The manufactured reinforced composite polymer electrolyte may maintain the electrochemical performance thereof while stably maintaining a structure thereof against mechanical deformation such as folding, bending and rolling, and can be used for a flexible lithium secondary battery.

Abstract: The present disclosure relates to a superhydrophobic coating material and a method for manufacturing the superhydrophobic coating material. The superhydrophobic coating material according to the present disclosure includes a substrate provided with a three-dimensional nano structure; and a coating layer comprising a rare earth metal oxide formed on the three-dimensional nano structure. The method for manufacturing the superhydrophobic coating material according to the present disclosure includes preparing a substrate provided with a three-dimensional nano structure; and forming a coating layer comprising a rare earth metal oxide on the three-dimensional nano structure by supplying a precursor including a rare earth metal and an oxidant one by one onto the substrate, and the temperature of the substrate is controlled in the forming step so that an atomic ratio of a carbon element in the coating layer is less than 1% to form the coating layer with superhydrophobic property.

Abstract: Discussed is a display device and a fabricating method thereof according to an embodiment, in which an organic-inorganic composite film is patterned without a mask by using an anti-film layer, and a residual anti-film layer protects a pad portion. The display device comprises a lower substrate; pixels arranged on a display area of the lower substrate; pads arranged on a non-display area of the lower substrate; an encapsulation layer arranged on the pixels; and an anti-film layer arranged on the pads as a molecular layer having a thickness of a single molecule. Also, the fabricating method of the display device comprises the steps of forming pads on a non-display area of a lower substrate and forming pixels on a display area; and forming an anti-film layer on the pixels as a molecular layer having a thickness of a single molecule.

Abstract: The present invention relates to a porous nano structure and a method of manufacturing same. The porous nano structure exhibits excellent mechanical strength and has a wide specific surface area and is therefore useful as an absorbent, a vibration absorber, a sound absorber, a shock absorber, a catalyst support, a membrane for separation, etc., and can be applied to various technical fields such as electronics, composite materials, sensors, catalysts, energy storage materials, and ultra-high capacity storage batteries. In particular, the porous nano structure exhibits excellent hydrogen storage capability and is thus very useful as a hydrogen storage material.

Abstract: Provided is a method of removing native oxide from a substrate, the method including exposing the substrate to trimethyl aluminum (TMA) or dicyclopentadienyl magnesium (MgCp2) for a predetermined time.

Abstract: Discussed is a display device and a fabricating method thereof according to an embodiment, in which an organic-inorganic composite film is patterned without a mask by using an anti-film layer, and a residual anti-film layer protects a pad portion. The display device comprises a lower substrate; pixels arranged on a display area of the lower substrate; pads arranged on a non-display area of the lower substrate; an encapsulation layer arranged on the pixels; and an anti-film layer arranged on the pads as a molecular layer having a thickness of a single molecule. Also, the fabricating method of the display device comprises the steps of forming pads on a non-display area of a lower substrate and forming pixels on a display area; and forming an anti-film layer on the pixels as a molecular layer having a thickness of a single molecule.

Abstract: The present invention relates to a hierarchical structure of graphene-carbon nanotubes and a method for preparing the same, and, more specifically, to a method for growing graphene into carbon nanotubes having a hierarchical structure by adding metal nanoparticles on the graphene. According to the present invention, carbon nanotubes having a hierarchical structure, which have an increased specific surface area compared to existing carbon nanotubes, can be obtained, and a carbon nanotube structure which is metal-functionalized by a metal precursor can be obtained. In addition, carbon nanotubes can be prepared in an environmentally-friendly manner by the use of microwaves.

Abstract: The present disclosure relates to a method for forming a coating layer and a coating material having waterproof property, and the method for forming a coating layer according to the present disclosure includes (a) supplying a precursor comprising a rare earth metal onto a substrate; (b) purging impurities of remaining precursor after combination of the rare earth metal onto the substrate; (c) supplying an oxidant onto the substrate; and (d) purging remaining impurities after forming a coating layer including a rare earth oxide on the substrate. According to the method for forming a coating layer of the present disclosure, a coating layer with hydrophobic or superhydrophobic property may be formed by controlling a temperature of the substrate so that an atomic ratio of a carbon element in the coating layer is less than 1% to form the coating layer with hydrophobic or superhydrophobic property.

Abstract: The present disclosure relates to a superhydrophobic coating material and a method for manufacturing the superhydrophobic coating material. The superhydrophobic coating material according to the present disclosure includes a substrate provided with a three-dimensional nano structure; and a coating layer comprising a rare earth metal oxide formed on the three-dimensional nano structure. The method for manufacturing the superhydrophobic coating material according to the present disclosure includes preparing a substrate provided with a three-dimensional nano structure; and forming a coating layer comprising a rare earth metal oxide on the three-dimensional nano structure by supplying a precursor including a rare earth metal and an oxidant one by one onto the substrate, and the temperature of the substrate is controlled in the forming step so that an atomic ratio of a carbon element in the coating layer is less than 1% to form the coating layer with superhydrophobic property.

Abstract: Disclosed are a method of manufacturing a graphene-carbon nanotube nanostructure which includes mixing graphite, a catalytic metal, and an ionic liquid, and then radiating microwaves on the mixture, and a graphene-carbon nanotube nanostructure manufactured using the method.

Abstract: Provided is a method of removing native oxide from a substrate, the method including exposing the substrate to trimethyl aluminum (TMA) or dicyclopentadienyl magnesium (MgCp2) for a predetermined time.

Abstract: The present invention relates to a hierarchical structure of graphene-carbon nanotubes and a method for preparing the same, and, more specifically, to a method for growing graphene into carbon nanotubes having a hierarchical structure by adding metal nanoparticles on the graphene. According to the present invention, carbon nanotubes having a hierarchical structure, which have an increased specific surface area compared to existing carbon nanotubes, can be obtained, and a carbon nanotube structure which is metal-functionalized by a metal precursor can be obtained. In addition, carbon nanotubes can be prepared in an environmentally-friendly manner by the use of microwaves.

Abstract: Disclosed are a method of manufacturing a graphene-carbon nanotube nanostructure which includes mixing graphite, a catalytic metal, and an ionic liquid, and then radiating microwaves on the mixture, and a graphene-carbon nanotube nanostructure manufactured using the method.

Abstract: The present invention relates to a method for preparing graphene, and more particularly to a method of preparing graphene sheets, which can prepare graphene sheets from a turbostratic graphitic structure such as carbon fiber in higher yield without using a strong oxidizing agent, and to graphene sheets prepared thereby.

Abstract: The present invention relates to a method for preparing graphene, and more particularly to a method of preparing graphene sheets, which can prepare graphene sheets from a turbostratic graphitic structure such as carbon fiber in higher yield without using a strong oxidizing agent, and to graphene sheets prepared thereby.