Patents by Inventor Il-Seok Son

Il-Seok Son has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240413237
    Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.
    Type: Application
    Filed: August 19, 2024
    Publication date: December 12, 2024
    Inventors: Patrick MORROW, Kimin JUN, Il-Seok SON, Donald W. NELSON
  • Patent number: 12100762
    Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.
    Type: Grant
    Filed: January 19, 2022
    Date of Patent: September 24, 2024
    Assignee: Intel Corporation
    Inventors: Patrick Morrow, Kimin Jun, Il-Seok Son, Donald W. Nelson
  • Patent number: 12100761
    Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.
    Type: Grant
    Filed: January 18, 2022
    Date of Patent: September 24, 2024
    Assignee: Intel Corporation
    Inventors: Patrick Morrow, Kimin Jun, Il-Seok Son, Donald W. Nelson
  • Patent number: 11594452
    Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: December 15, 2020
    Date of Patent: February 28, 2023
    Assignee: Intel Corporation
    Inventors: Il-Seok Son, Colin T. Carver, Paul B. Fischer, Patrick Morrow, Kimin Jun
  • Publication number: 20220140128
    Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.
    Type: Application
    Filed: January 19, 2022
    Publication date: May 5, 2022
    Inventors: Patrick MORROW, Kimin JUN, Il-Seok SON, Donald W. NELSON
  • Publication number: 20220140127
    Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.
    Type: Application
    Filed: January 18, 2022
    Publication date: May 5, 2022
    Inventors: Patrick MORROW, Kimin JUN, Il-Seok SON, Donald W. NELSON
  • Patent number: 11264493
    Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: March 1, 2022
    Assignee: Intel Corporation
    Inventors: Patrick Morrow, Kimin Jun, Il-Seok Son, Donald W. Nelson
  • Publication number: 20210104435
    Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: December 15, 2020
    Publication date: April 8, 2021
    Inventors: Il-Seok SON, Colin T. CARVER, Paul B. FISCHER, Patrick MORROW, Kimin JUN
  • Patent number: 10896847
    Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: August 13, 2019
    Date of Patent: January 19, 2021
    Assignee: Intel Corporation
    Inventors: Il-Seok Son, Colin T. Carver, Paul B. Fischer, Patrick Morrow, Kimin Jun
  • Patent number: 10797139
    Abstract: Methods and structures formed thereby are described, of forming self-aligned contact structures for microelectronic devices. An embodiment includes forming a trench in a source/drain region of a transistor device disposed in a device layer, wherein the device layer is on a substrate, forming a fill material in the trench, forming a source/drain material on the fill material, forming a first source/drain contact on a first side of the source/drain material, and then forming a second source drain contact on a second side of the source/drain material.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: October 6, 2020
    Assignee: Intel Corporation
    Inventors: Patrick Morrow, Mauro J. Kobrinsky, Kimin Jun, Il-Seok Son, Paul B. Fischer
  • Publication number: 20190371666
    Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: August 13, 2019
    Publication date: December 5, 2019
    Inventors: Il-Seok SON, Colin T. CARVER, Paul B. FISCHER, Patrick MORROW, Kimin JUN
  • Patent number: 10490449
    Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: November 26, 2019
    Assignee: Intel Corporation
    Inventors: Il-Seok Son, Colin T. Carver, Paul B. Fischer, Patrick Morrow, Kimin Jun
  • Publication number: 20190326405
    Abstract: Methods and structures formed thereby are described, of forming self-aligned contact structures for microelectronic devices. An embodiment includes forming a trench in a source/drain region of a transistor device disposed in a device layer, wherein the device layer is on a substrate, forming a fill material in the trench, forming a source/drain material on the fill material, forming a first source/drain contact on a first side of the source/drain material, and then forming a second source drain contact on a second side of the source/drain material.
    Type: Application
    Filed: June 28, 2019
    Publication date: October 24, 2019
    Applicant: Intel Corporation
    Inventors: Patrick Morrow, Mauro J. Kobrinsky, Kimin Jun, Il-Seok Son, Paul B. Fischer
  • Patent number: 10367070
    Abstract: Methods and structures formed thereby are described, of forming self-aligned contact structures for microelectronic devices. An embodiment includes forming a trench in a source/drain region of a transistor device disposed in a device layer, wherein the device layer is on a substrate, forming a fill material in the trench, forming a source/drain material on the fill material, forming a first source/drain contact on a first side of the source/drain material, and then forming a second source drain contact on a second side of the source/drain material.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: July 30, 2019
    Assignee: Intel Corporation
    Inventors: Patrick Morrow, Mauro J. Kobrinsky, Kimin Jun, Il-Seok Son, Paul B. Fischer
  • Patent number: 10236282
    Abstract: An embodiment includes an apparatus comprising: a first layer, including a first semiconductor switching element, coupled to a first portion of a first bonding material; and a second layer, including a second semiconductor switching element, coupled to a second portion of a second bonding material; wherein (a) the first layer is over the second layer, (b) the first portion is directly connected to the second portion, and (c) first sidewalls of the first portion are unevenly serrated. Other embodiments are described herein.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: March 19, 2019
    Assignee: Intel Corporation
    Inventors: Patrick Morrow, Kimin Jun, Il-Seok Son, Rajashree Baskaran, Paul B. Fischer
  • Publication number: 20180248012
    Abstract: Methods and structures formed thereby are described, of forming self-aligned contact structures for microelectronic devices. An embodiment includes forming a trench in a source/drain region of a transistor device disposed in a device layer, wherein the device layer is on a substrate, forming a fill material in the trench, forming a source/drain material on the fill material, forming a first source/drain contact on a first side of the source/drain material, and then forming a second source drain contact on a second side of the source/drain material.
    Type: Application
    Filed: September 24, 2015
    Publication date: August 30, 2018
    Applicant: Intel Corporation
    Inventors: Patrick Morrow, Mauro J. Kobrinsky, Kimin Jun, Il-Seok Son, Paul B. Fischer
  • Publication number: 20180233409
    Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 24, 2015
    Publication date: August 16, 2018
    Inventors: Il-Seok SON, Colin T. CARVER, Paul B. FISCHER, Patrick MORROW, Kimin JUN
  • Publication number: 20180219090
    Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.
    Type: Application
    Filed: September 25, 2015
    Publication date: August 2, 2018
    Inventors: Patrick MORROW, Kimin JUN, Il-Seok SON, Donald W. NELSON
  • Patent number: 9721898
    Abstract: Methods of forming microelectronic interconnect under device structures are described. Those methods and structures may include forming a device layer in a first substrate, forming at least one routing layer in a second substrate, and then coupling the first substrate with the second substrate, wherein the first substrate is bonded to the second substrate.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: August 1, 2017
    Assignee: Intel Corporation
    Inventors: Patrick Morrow, Don Nelson, M. Clair Webb, Kimin Jun, Il-Seok Son
  • Patent number: 9490201
    Abstract: Methods of forming microelectronic interconnect under device structures are described. Those methods and structures may include forming a device layer in a first substrate, forming at least one routing layer in a second substrate, and then coupling the first substrate with the second substrate, wherein the first substrate is bonded to the second substrate.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: November 8, 2016
    Assignee: Intel Corporation
    Inventors: Patrick Morrow, Don Nelson, M. Clair Webb, Kimin Jun, Il-Seok Son