Patents by Inventor Il-Seok Son
Il-Seok Son has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240413237Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.Type: ApplicationFiled: August 19, 2024Publication date: December 12, 2024Inventors: Patrick MORROW, Kimin JUN, Il-Seok SON, Donald W. NELSON
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Patent number: 12100762Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.Type: GrantFiled: January 19, 2022Date of Patent: September 24, 2024Assignee: Intel CorporationInventors: Patrick Morrow, Kimin Jun, Il-Seok Son, Donald W. Nelson
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Patent number: 12100761Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.Type: GrantFiled: January 18, 2022Date of Patent: September 24, 2024Assignee: Intel CorporationInventors: Patrick Morrow, Kimin Jun, Il-Seok Son, Donald W. Nelson
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Patent number: 11594452Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.Type: GrantFiled: December 15, 2020Date of Patent: February 28, 2023Assignee: Intel CorporationInventors: Il-Seok Son, Colin T. Carver, Paul B. Fischer, Patrick Morrow, Kimin Jun
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Publication number: 20220140128Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.Type: ApplicationFiled: January 19, 2022Publication date: May 5, 2022Inventors: Patrick MORROW, Kimin JUN, Il-Seok SON, Donald W. NELSON
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Publication number: 20220140127Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.Type: ApplicationFiled: January 18, 2022Publication date: May 5, 2022Inventors: Patrick MORROW, Kimin JUN, Il-Seok SON, Donald W. NELSON
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Patent number: 11264493Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.Type: GrantFiled: September 25, 2015Date of Patent: March 1, 2022Assignee: Intel CorporationInventors: Patrick Morrow, Kimin Jun, Il-Seok Son, Donald W. Nelson
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Publication number: 20210104435Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.Type: ApplicationFiled: December 15, 2020Publication date: April 8, 2021Inventors: Il-Seok SON, Colin T. CARVER, Paul B. FISCHER, Patrick MORROW, Kimin JUN
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Patent number: 10896847Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.Type: GrantFiled: August 13, 2019Date of Patent: January 19, 2021Assignee: Intel CorporationInventors: Il-Seok Son, Colin T. Carver, Paul B. Fischer, Patrick Morrow, Kimin Jun
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Patent number: 10797139Abstract: Methods and structures formed thereby are described, of forming self-aligned contact structures for microelectronic devices. An embodiment includes forming a trench in a source/drain region of a transistor device disposed in a device layer, wherein the device layer is on a substrate, forming a fill material in the trench, forming a source/drain material on the fill material, forming a first source/drain contact on a first side of the source/drain material, and then forming a second source drain contact on a second side of the source/drain material.Type: GrantFiled: June 28, 2019Date of Patent: October 6, 2020Assignee: Intel CorporationInventors: Patrick Morrow, Mauro J. Kobrinsky, Kimin Jun, Il-Seok Son, Paul B. Fischer
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Publication number: 20190371666Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.Type: ApplicationFiled: August 13, 2019Publication date: December 5, 2019Inventors: Il-Seok SON, Colin T. CARVER, Paul B. FISCHER, Patrick MORROW, Kimin JUN
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Patent number: 10490449Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.Type: GrantFiled: September 24, 2015Date of Patent: November 26, 2019Assignee: Intel CorporationInventors: Il-Seok Son, Colin T. Carver, Paul B. Fischer, Patrick Morrow, Kimin Jun
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Publication number: 20190326405Abstract: Methods and structures formed thereby are described, of forming self-aligned contact structures for microelectronic devices. An embodiment includes forming a trench in a source/drain region of a transistor device disposed in a device layer, wherein the device layer is on a substrate, forming a fill material in the trench, forming a source/drain material on the fill material, forming a first source/drain contact on a first side of the source/drain material, and then forming a second source drain contact on a second side of the source/drain material.Type: ApplicationFiled: June 28, 2019Publication date: October 24, 2019Applicant: Intel CorporationInventors: Patrick Morrow, Mauro J. Kobrinsky, Kimin Jun, Il-Seok Son, Paul B. Fischer
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Patent number: 10367070Abstract: Methods and structures formed thereby are described, of forming self-aligned contact structures for microelectronic devices. An embodiment includes forming a trench in a source/drain region of a transistor device disposed in a device layer, wherein the device layer is on a substrate, forming a fill material in the trench, forming a source/drain material on the fill material, forming a first source/drain contact on a first side of the source/drain material, and then forming a second source drain contact on a second side of the source/drain material.Type: GrantFiled: September 24, 2015Date of Patent: July 30, 2019Assignee: Intel CorporationInventors: Patrick Morrow, Mauro J. Kobrinsky, Kimin Jun, Il-Seok Son, Paul B. Fischer
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Patent number: 10236282Abstract: An embodiment includes an apparatus comprising: a first layer, including a first semiconductor switching element, coupled to a first portion of a first bonding material; and a second layer, including a second semiconductor switching element, coupled to a second portion of a second bonding material; wherein (a) the first layer is over the second layer, (b) the first portion is directly connected to the second portion, and (c) first sidewalls of the first portion are unevenly serrated. Other embodiments are described herein.Type: GrantFiled: December 18, 2013Date of Patent: March 19, 2019Assignee: Intel CorporationInventors: Patrick Morrow, Kimin Jun, Il-Seok Son, Rajashree Baskaran, Paul B. Fischer
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Publication number: 20180248012Abstract: Methods and structures formed thereby are described, of forming self-aligned contact structures for microelectronic devices. An embodiment includes forming a trench in a source/drain region of a transistor device disposed in a device layer, wherein the device layer is on a substrate, forming a fill material in the trench, forming a source/drain material on the fill material, forming a first source/drain contact on a first side of the source/drain material, and then forming a second source drain contact on a second side of the source/drain material.Type: ApplicationFiled: September 24, 2015Publication date: August 30, 2018Applicant: Intel CorporationInventors: Patrick Morrow, Mauro J. Kobrinsky, Kimin Jun, Il-Seok Son, Paul B. Fischer
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Publication number: 20180233409Abstract: Embodiments of the present disclosure describe techniques for revealing a backside of an integrated circuit (IC) device, and associated configurations. The IC device may include a plurality of fins formed on a semiconductor substrate (e.g., silicon substrate), and an isolation oxide may be disposed between the fins along the backside of the IC device. A portion of the semiconductor substrate may be removed to leave a remaining portion. The remaining portion may be removed by chemical mechanical planarization (CMP) using a selective slurry to reveal the backside of the IC device. Other embodiments may be described and/or claimed.Type: ApplicationFiled: September 24, 2015Publication date: August 16, 2018Inventors: Il-Seok SON, Colin T. CARVER, Paul B. FISCHER, Patrick MORROW, Kimin JUN
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Publication number: 20180219090Abstract: An apparatus including a circuit structure including a first side including a device layer including a plurality of devices and an opposite second side; an electrically conductive contact coupled to one of the plurality of devices on the first side; and an electrically conductive interconnect disposed on the second side of the structure and coupled to the conductive contact. A method including forming a transistor device including a channel between a source and a drain and a gate electrode on the channel defining a first side of the device; forming an electrically conductive contact to one of the source and the drain from the first side; and forming an interconnect on a second side of the device, wherein the interconnect is coupled to the contact.Type: ApplicationFiled: September 25, 2015Publication date: August 2, 2018Inventors: Patrick MORROW, Kimin JUN, Il-Seok SON, Donald W. NELSON
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Patent number: 9721898Abstract: Methods of forming microelectronic interconnect under device structures are described. Those methods and structures may include forming a device layer in a first substrate, forming at least one routing layer in a second substrate, and then coupling the first substrate with the second substrate, wherein the first substrate is bonded to the second substrate.Type: GrantFiled: October 4, 2016Date of Patent: August 1, 2017Assignee: Intel CorporationInventors: Patrick Morrow, Don Nelson, M. Clair Webb, Kimin Jun, Il-Seok Son
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Patent number: 9490201Abstract: Methods of forming microelectronic interconnect under device structures are described. Those methods and structures may include forming a device layer in a first substrate, forming at least one routing layer in a second substrate, and then coupling the first substrate with the second substrate, wherein the first substrate is bonded to the second substrate.Type: GrantFiled: March 13, 2013Date of Patent: November 8, 2016Assignee: Intel CorporationInventors: Patrick Morrow, Don Nelson, M. Clair Webb, Kimin Jun, Il-Seok Son