Abstract: A method of a first terminal may include: identifying first RB set(s) to be used for SL communication among consecutive RB sets through an LBT procedure; identifying a first subchannel group included in the first RB set(s) and a second subchannel group including a first PRB in the first RB set(s), the first PRB being not included in the first subchannel group; configuring the first PRB within the second subchannel group as an SL communication resource; and transmitting, to a second terminal, control information indicating that the first PRB is configured as the SL communication resource.

Abstract: The defect imaging apparatus including a chamber having a stage to which a substrate having at least one process defect and at least one reference defects defined at a given area is secured, a position controller configured to obtain an imaging error from a detected actual position and a conversion position of the reference defect and correct a conversion position of the process defect by the imaging error, and generate an irradiation position corresponding to an actual position of the process defect, an image signal generator configured to generate an image signal of the process defect by irradiating an electron beam to the irradiation position and detecting charged particles from the irradiation position in response to the irradiated electron beam, and an imaging device configured to generate a defect image of the process defect by processing the generated image signal may be provided.

Abstract: A method of automatic defect classification (ADC) includes detecting defective parts from a substrate wherein at least one unit process is performed; and classifying defect types of the respective defective parts, wherein the classifying includes obtaining a scanning electron microscope (SEM) image of each of the defective parts; registering information about the substrate in a graphic data system (GDS) image corresponding to each SEM image; defining a plurality of defects of interest (DOIs) categorizing defects of the respective defective parts; defining a DOI rule that is a criterion for determining which defects of the respective defective parts correspond to which DOI from among the DOIs; and analyzing the image to classify which defects of the respective defective parts correspond to which DOI from among the DOIs according to the DOI rule.

Abstract: The defect imaging apparatus including a chamber having a stage to which a substrate having at least one process defect and at least one reference defects defined at a given area is secured, a position controller configured to obtain an imaging error from a detected actual position and a conversion position of the reference defect and correct a conversion position of the process defect by the imaging error, and generate an irradiation position corresponding to an actual position of the process defect, an image signal generator configured to generate an image signal of the process defect by irradiating an electron beam to the irradiation position and detecting charged particles from the irradiation position in response to the irradiated electron beam, and an imaging device configured to generate a defect image of the process defect by processing the generated image signal may be provided.

Abstract: A method of automatic defect classification (ADC) includes detecting defective parts from a substrate wherein at least one unit process is performed; and classifying defect types of the respective defective parts, wherein the classifying includes obtaining a scanning electron microscope (SEM) image of each of the defective parts; registering information about the substrate in a graphic data system (GDS) image corresponding to each SEM image; defining a plurality of defects of interest (DOIs) categorizing defects of the respective defective parts; defining a DOI rule that is a criterion for determining which defects of the respective defective parts correspond to which DOI from among the DOIs; and analyzing the image to classify which defects of the respective defective parts correspond to which DOI from among the DOIs according to the DOI rule.