Patents by Inventor Ilia Slobodov
Ilia Slobodov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11976642Abstract: Some embodiments of the invention include a thruster system comprising a thruster and a pulsing power supply. The thruster may include a gas inlet port; a plasma jet outlet; and a first electrode. In some embodiments, the pulsing power supply may provide an electrical potential to the first electrode with a pulse repetition frequency greater than 10 kHz, a voltage greater than 5 kilovolts. In some embodiments, the pressure downstream from the thruster can be less than 10 Torr. In some embodiments, when a plasma is produced within the thruster by energizing a gas flowing into the thruster through the gas inlet port, the plasma is expelled from the thruster through the plasma jet outlet.Type: GrantFiled: December 22, 2022Date of Patent: May 7, 2024Assignee: EHT Ventures LLCInventors: Timothy M. Ziemba, James R. Prager, John G. Carscadden, Kenneth E. Miller, Ilia Slobodov, Julian F. Picard, Akel Hashim
-
Publication number: 20240136152Abstract: A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.Type: ApplicationFiled: October 23, 2023Publication date: April 25, 2024Inventors: Kenneth Miller, John Carscadden, Ilia Slobodov, Timothy Ziemba, Huatsern Yeager, Eric Hanson, TaiSheng Yeager, Kevin Muggli, Morgan Quinley, James Prager, Connor Liston
-
Patent number: 11962304Abstract: Some embodiments of the invention include a pre-pulse switching system. The pre-pulsing switching system may include: a power source configured to provide a voltage greater than 100 V; a pre-pulse switch coupled with the power source and configured to provide a pre-pulse having a pulse width of Tpp; and a main switch coupled with the power source and configured to provide a main pulse such that an output pulse comprises a single pulse with negligible ringing. The pre-pulse may be provided to a load by closing the pre-pulse switch while the main switch is open. The main pulse may be provided to the load by closing the main switch after a delay Tdelay after the pre-pulse switch has been opened.Type: GrantFiled: March 29, 2022Date of Patent: April 16, 2024Assignee: EHT VENTURES LLCInventors: Kenneth E. Miller, James R. Prager, Ilia Slobodov, Julian F. Picard
-
Publication number: 20240055227Abstract: Some embodiments include a high voltage waveform generator comprising: a generator inductor; a high voltage nanosecond pulser having one or more solid state switches electrically and/or inductively coupled with the generator inductor, the high voltage nanosecond pulser configured to produce a pulse burst having a burst period, the pulse burst comprising a plurality of pulses having different pulse widths; and a load electrically and/or inductively coupled with the high voltage nanosecond pulser, the generator inductor, and the generator capacitor, the voltage across the load having an output pulse with a pulse width substantially equal to the burst period and the voltage across the load varying in a manner that is substantially proportional with the pulse widths of the plurality of pulses.Type: ApplicationFiled: May 22, 2023Publication date: February 15, 2024Inventors: Timothy M. Ziemba, Kenneth E. Miller, John G. Carscadden, James R. Prager, Ilia Slobodov
-
Publication number: 20240048056Abstract: Some embodiments include methods and systems for wafer biasing in a plasma chamber. A method, for example, may include: generating a first high voltage by a first pulsed voltage source using DC voltages and coupling the first high voltage to a wafer in the plasma chamber via at least one direct connection, the at least one direct connection enabling ion energy control in the plasma chamber; generating one or more of low and medium voltages by a second pulsed voltage source; coupling, capacitively, the one or more of low and medium voltages to the wafer; and pulsing the first high voltage and the one or more of low and medium voltages to achieve a configurable ion energy distribution in the wafer.Type: ApplicationFiled: August 16, 2023Publication date: February 8, 2024Inventors: Kenneth Miller, Timothy Ziemba, John Carscadden, Ilia Slobodov, James Prager
-
Patent number: 11875971Abstract: Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.Type: GrantFiled: February 8, 2022Date of Patent: January 16, 2024Assignee: Eagle Harbor Technologies, Inc.Inventors: James Prager, Timothy Ziemba, Kenneth Miller, Ilia Slobodov, Morgan Quinley
-
Patent number: 11860126Abstract: Some embodiments of the invention may include an eddy current nondestructive evaluation device. The eddy current nondestructive evaluation device may include a rotating body; a motor coupled with the rotating body such that the motor rotates the rotating body; a permanent magnet coupled with the rotating body; a pickup coil coupled with the rotating body; and an integrator circuit electrically coupled with the pickup coil that integrates a voltage from the pickup coil to produce integrated voltage data.Type: GrantFiled: October 4, 2021Date of Patent: January 2, 2024Assignee: EHT Ventures LLCInventors: James R. Prager, Timothy M. Ziemba, Kenneth E. Miller, Ilia Slobodov, Paul Melnik, Connor Liston, Kevin Muggli, TaiSheng Yeager, John G. Carscadden
-
Patent number: 11824454Abstract: Some embodiments include methods and systems for wafer biasing in a plasma chamber. A method, for example, may include: generating a first high voltage by a first pulsed voltage source using DC voltages and coupling the first high voltage to a wafer in the plasma chamber via at least one direct connection, the at least one direct connection enabling ion energy control in the plasma chamber; generating one or more of low and medium voltages by a second pulsed voltage source; coupling, capacitively, the one or more of low and medium voltages to the wafer; and pulsing the first high voltage and the one or more of low and medium voltages to achieve a configurable ion energy distribution in the wafer.Type: GrantFiled: July 1, 2021Date of Patent: November 21, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Kenneth Miller, Timothy Ziemba, John Carscadden, Ilia Slobodov, James Prager
-
Patent number: 11810761Abstract: A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.Type: GrantFiled: August 24, 2021Date of Patent: November 7, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Ilia Slobodov, John Carscadden, Kenneth Miller, Timothy Ziemba, Huatsern Yeager, Eric Hanson, TaiSheng Yeager, Kevin Muggli, Morgan Quinley, James Prager, Connor Liston
-
Publication number: 20230336085Abstract: A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.Type: ApplicationFiled: June 24, 2023Publication date: October 19, 2023Inventors: Timothy Ziemba, Ilia Slobodov, Alex Henson, Morgan Quinley, John Carscadden, James Prager, Kenneth Miller
-
Patent number: 11689107Abstract: A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.Type: GrantFiled: March 26, 2021Date of Patent: June 27, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Timothy Ziemba, Ilia Slobodov, Alex Henson, Morgan Quinley, John Carscadden, James Prager, Kenneth Miller
-
Publication number: 20230184232Abstract: Some embodiments of the invention include a thruster system comprising a thruster and a pulsing power supply. The thruster may include a gas inlet port; a plasma jet outlet; and a first electrode. In some embodiments, the pulsing power supply may provide an electrical potential to the first electrode with a pulse repetition frequency greater than 10 kHz, a voltage greater than 5 kilovolts. In some embodiments, the pressure downstream from the thruster can be less than 10 Torr. In some embodiments, when a plasma is produced within the thruster by energizing a gas flowing into the thruster through the gas inlet port, the plasma is expelled from the thruster through the plasma jet outlet.Type: ApplicationFiled: December 22, 2022Publication date: June 15, 2023Inventors: Timothy M. Ziemba, James R. Prager, John G. Carscadden, Kenneth E. Miller, Ilia Slobodov, Julian F. Picard, Akel Hashim
-
Patent number: 11658007Abstract: Some embodiments include a high voltage waveform generator comprising: a generator inductor; a high voltage nanosecond pulser having one or more solid state switches electrically and/or inductively coupled with the generator inductor, the high voltage nanosecond pulser configured to produce a pulse burst having a burst period, the pulse burst comprising a plurality of pulses having different pulse widths; and a load electrically and/or inductively coupled with the high voltage nanosecond pulser, the generator inductor, and the generator capacitor, the voltage across the load having an output pulse with a pulse width substantially equal to the burst period and the voltage across the load varying in a manner that is substantially proportional with the pulse widths of the plurality of pulses.Type: GrantFiled: June 8, 2022Date of Patent: May 23, 2023Assignee: EAGLE HARBOR TECHNOLOGIES, INC.Inventors: Timothy M. Ziemba, Kenneth E. Miller, John G. Carscadden, James R. Prager, Ilia Slobodov
-
Patent number: 11646176Abstract: Some embodiments include a high voltage, high frequency switching circuit.Type: GrantFiled: September 25, 2020Date of Patent: May 9, 2023Assignee: EAGLE HARBOR TECHNOLOGIES, INC.Inventors: James Prager, Timothy Ziemba, Kenneth Miller, Ilia Slobodov
-
Patent number: 11636998Abstract: Some embodiments include a high voltage pulsing power supply. A high voltage pulsing power supply may include: a high voltage pulser having an output that provides pulses with an amplitude greater than about 1 kV, a pulse width greater than about 1 ?s, and a pulse repetition frequency greater than about 20 kHz; a plasma chamber; and an electrode disposed within the plasma chamber that is electrically coupled with the output of the high voltage pulser to produce a pulsing an electric field within the chamber.Type: GrantFiled: January 5, 2021Date of Patent: April 25, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, Morgan Quinley
-
Patent number: 11631573Abstract: Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz and an output. The switching circuit may also include a resistive output stage electrically coupled in parallel with the output and between the output stage and the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output. In some embodiments, the resistive output stage may be configured to discharge over about 1 kilowatt of average power during each pulse cycle. In some embodiments, the output can produce a high voltage pulse having a voltage greater than 1 kV and with frequencies greater than 10 kHz with a pulse fall time less than about 400 ns.Type: GrantFiled: November 13, 2020Date of Patent: April 18, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Timothy M. Ziemba, Kenneth E. Miller, James R. Prager, John G. Carscadden, Ilia Slobodov
-
Publication number: 20230093824Abstract: Some embodiments may include a nanosecond pulser comprising a plurality of solid state switches; a transformer having a stray inductance, Ls, a stray capacitance, Cs, and a turn ratio n; and a resistor with a resistance, R, in series between the transformer and the switches. In some embodiments, the resonant circuit produces a Q factor according to Q = 1 R ? L s C s , and the nanosecond pulser produces an output voltage Vout from an input voltage Vin, according to Vout=QnVin.Type: ApplicationFiled: November 7, 2022Publication date: March 30, 2023Inventors: Kenneth E. Miller, James R. Prager, Timothy M. Ziemba, John G. Carscadden, Ilia Slobodov, Alex Patrick Henson
-
Patent number: 11587768Abstract: Some embodiments include a thermal management system for a nanosecond pulser. In some embodiments, the thermal management system may include a switch cold plates coupled with switches, a core cold plate coupled with one or more transformers, resistor cold plates coupled with resistors, or tubing coupled with the switch cold plates, the core cold plates, and the resistor cold plates. The thermal management system may include a heat exchanger coupled with the resistor cold plates, the core cold plate, the switch cold plate, and the tubing. The heat exchanger may also be coupled with a facility fluid supply.Type: GrantFiled: April 15, 2021Date of Patent: February 21, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, Connor Liston
-
Patent number: 11551908Abstract: A plasma deposition system comprising a wafer platform, a second electrode, a first electrode, a first high voltage pulser, and a second high voltage pulser. In some embodiments, the second electrode may be disposed proximate with the wafer platform. In some embodiments, the second electrode can include a disc shape with a central aperture; a central axis, an aperture diameter, and an outer diameter. In some embodiments, the first electrode may be disposed proximate with the wafer platform and within the central aperture of the second electrode. In some embodiments, the first electrode can include a disc shape, a central axis, and an outer diameter. In some embodiments, the first high voltage pulser can be electrically coupled with the first electrode. In some embodiments, the second high voltage pulser can be electrically coupled with the second electrode.Type: GrantFiled: June 25, 2021Date of Patent: January 10, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Timothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, James Prager
-
Patent number: 11542927Abstract: Some embodiments of the invention include a thruster system comprising a thruster and a pulsing power supply. The thruster may include a gas inlet port; a plasma jet outlet; and a first electrode. In some embodiments, the pulsing power supply may provide an electrical potential to the first electrode with a pulse repetition frequency greater than 10 kHz, a voltage greater than 5 kilovolts. In some embodiments, the pressure downstream from the thruster can be less than 10 Torr. In some embodiments, when a plasma is produced within the thruster by energizing a gas flowing into the thruster through the gas inlet port, the plasma is expelled from the thruster through the plasma jet outlet.Type: GrantFiled: May 4, 2016Date of Patent: January 3, 2023Assignee: Eagle Harbor Technologies, Inc.Inventors: Timothy M. Ziemba, James R. Prager, John G. Carscadden, Kenneth E. Miller, Ilia Slobodov, Julian F. Picard, Akel Hashim