Abstract: Implementations disclosed describe an inspection device capable of being transferred by a robot blade into a processing chamber of a manufacturing machine, the inspection device comprising an optical sensor to detect light reflected from a target located within the processing chamber, wherein the optical sensor is to output, to a processing device, a signal representative of a state of a region of a surface of the target.

Abstract: A new class of alkoxyamines, exhibiting improved stability on storage, especially in the presence of monomers and/or of solvent is described, particularly where the alkoxylamines are a new class of oligomeric alkoxyamines, which are obtained by addition of one or more monomeric entities to an alkoxyamine.

Abstract: Implementations disclosed describe an inspection device capable of being transferred by a robot blade into a processing chamber of a manufacturing machine, the inspection device comprising an optical sensor to detect light reflected from a target located within the processing chamber, wherein the optical sensor is to output, to a processing device, a signal representative of a state of a region of a surface of the target.

Abstract: A new class of alkoxyamines, exhibiting improved stability on storage, especially in the presence of monomers and/or of solvent is described, particularly where the alkoxylamines are a new class of oligomeric alkoxyamines, which are obtained by addition of one or more monomeric entities to an alkoxyamine.

Abstract: In one embodiment of the invention, a method for predicting a susceptor's service life in a processing chamber is disclosed. The method begins by creating virtual sensors in a processing chamber having a susceptor. The virtual sensors monitor one or more parameters on the susceptor and the age of the susceptor is tracked throughout the susceptor's life in the processing chamber with the virtual sensors.

Abstract: A composition results from the mixture of at least one lubricating oil, at least one statistical copolymer A1 , and at least one compound A2 including at least two boronic ester functions; the statistical copolymer A1 resulting from the copolymerisation of at least a first monomer M1 having diol functions and at least a second monomer M2 having a different chemical structure from that of the M1 monomer. The composition lubricates a mechanical part. The field is that of lubricants.

Abstract: Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data.

Abstract: Embodiments presented herein provide techniques for controlling deposition processes in a process chamber based on monitoring contaminant gas levels in a chamber. Embodiments include generating a data model defining acceptable levels within the chamber for each of a plurality of gas types. Gas levels of the plurality of gas types within the chamber are monitored using one or more sensor devices within the chamber. Upon determining that at least one gas level within the chamber violates the acceptable level for the respective gas type within the data model, embodiments perform a corrective action for the chamber.

Abstract: The present invention generally relates to a method for detecting the breakage of one or more grounding straps without stopping processing or opening the processing chamber for inspection. In one embodiment, a method for detecting grounding strap breakage in a processing chamber includes monitoring real-time RF related data from plasma generated in the processing chamber. The method also includes comparing the real-time RF related data with a pre-determined threshold RF related data. The method includes generating an alert if the real-time RF related data meets or exceeds the pre-determined threshold RF related data. In one embodiment, the RF related data includes RF frequency, direct current voltage, voltage peak-to-peak, and/or RF reflected power.

Abstract: Methods and apparatus for determining substrate integrity and alignment are described. Devices as described herein can include a transfer chamber, one or more process chambers, a loadlock chamber a first optical device, a second optical device and a radiation source positioned outside and above an opening for the loadlock chamber. Methods as described herein can include delivering a substrate to an opening in a process chamber, activating the optical device and the radiation source and capturing a plurality of images, extracting a substrate edge pattern from the plurality of images, comparing the substrate edge pattern to an expected edge pattern to determine a level of edge variance and adjusting or stopping a process if the level of edge variance is outside of an edge variation range.

Abstract: A method and apparatus for detecting substrate arcing and breakage within a processing chamber is provided. A controller monitors chamber data, e.g., parameters such as RF signals, voltages, and other electrical parameters, during operation of the processing chamber, and analyzes the chamber data for abnormal spikes and trends. Using such data mining and analysis, the controller can detect broken substrates without relying on glass presence sensors on robots, but rather based on the chamber data.

Abstract: The present invention relates to a process for producing nanostructured films obtained from block copolymers exhibiting a dispersity index of between 1.1 and 2, limits included, without nanostructuring defects, on a surface, in order for this treated surface to be able to be used as masks for applications in microelectronics.

Abstract: A process for preparing graft polymers from a polymer is based on conjugated diene units and a graft which is a thiol derivative. The process has an absence of solvent and any radical initiator. The graft polymer can be advantageously be used as additive for a bitumen/polymer composition and in particular permits thermoreversible cross-linking.

Abstract: A thermoreversibly cross-linked graft polymer, which may be used in bituminous asphalt, includes: a main polymer chain P consisting of conjugated diene units; at least one side graft G having the following general formula (1): R—(OCH2CH2)m—S—, where R is a straight or branched saturated hydrocarbon chain having at least 18 carbon atoms, and m is an integer varying from 0 to 20, the graft G being connected to the main polymer chain P via the sulfur atom of formula (1); and at least one graft G? having the following general formula (4): —S—R?—S—, where R? is a linear or branched, saturated or unsaturated hydrocarbon grouping having from 2 to 40 carbon atoms, optionally including one or more heteroatoms, the graft G? being connected to the main polymer chain P via each sulfur atom of formula (4).

Abstract: Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data.

Abstract: The disclosure relates to a bitumen/polymer composition comprising at least one bitumen and at least one graft polymer, the grafts enabling the bitumen/polymer compositions to be thermoreversibly cross-linked. The disclosure also relates to the use of said bitumen/polymer compositions in fields of application relating to roads, especially in the production of asphalt binders, and in industrial fields of application. The disclosure further relates to the method for producing said thermoreversibly cross-linked bitumen/polymer compositions.

Abstract: A graft polymer PG includes a polymer backbone P and at least one side graft G linked to the polymer backbone, the graft G having the general formula (1): in which R1 and R2 represent, separately from one another, straight or branched, unsaturated or saturated hydrocarbon groups, such that the total number of carbon atoms in groups R1 and R2 is between 2 and 110; X represents an amide, amino-acid, urea or urethane function, the graft G being linked to the polymer backbone P via the sulphur atom. The graft polymer PG is a polymer that allows thermoreversible cross-linking and can be used in many fields such as coatings, paints, thermoplastics, adhesives, lubricants, fuels, inks, cements, construction materials, rubbers and bitumens. The graft polymer PG can be used in particular for thermoreversibly cross-linking bitumen/polymer compositions and thus for reducing coating, spreading and/or compaction temperatures during the production of bituminous coated materials.

Abstract: The disclosure relates to a bitumen/polymer composition comprising at least one bitumen and at least one graft polymer, the grafts enabling the bitumen/polymer compositions to be thermoreversibly cross-linked. The disclosure also relates to the use of said bitumen/polymer compositions in fields of application relating to roads, especially in the production of asphalt binders, and in industrial fields of application. The disclosure further relates to the method for producing said thermoreversibly cross-linked bitumen/polymer compositions.

Abstract: The disclosure relates to a bitumen/polymer composition comprising at least one bitumen and at least one graft polymer, the grafts enabling the bitumen/polymer compositions to be thermoreversibly cross-linked. The disclosure also relates to the use of said bitumen/polymer compositions in fields of application relating to roads, especially in the production of asphalt binders, and in industrial fields of application. The disclosure further relates to the method for producing said thermoreversibly cross-linked bitumen/polymer compositions.

Abstract: Methods and systems for determining a radial differential metrology profile of a substrate heated in a process chamber is provided. Methods and systems for determining an angular or azimuthal differential metrology profile of a rotating substrate in a processing chamber are also provided. The radial and azimuthal differential metrology profiles are applied to adjust a reference metrology profile to provide a Virtual metrology of the process chamber. The virtual metrology is applied to control the performance of the process chamber.