Patents by Inventor Ilker Ender Ocak
Ilker Ender Ocak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10033305Abstract: According to embodiments of the present invention, an energy harvesting device is provided. The energy harvesting device includes a plurality of energy harvesting elements, each energy harvesting element including a transducer, and at least one spring arranged in between at least two energy harvesting elements of the plurality of energy harvesting elements to mechanically couple the at least two energy harvesting elements to each other. According to further embodiments of the present invention, a method for forming an energy harvesting device is also provided.Type: GrantFiled: November 21, 2014Date of Patent: July 24, 2018Assignee: Agency for Science, Technology and ResearchInventors: Chengliang Sun, Xiaojing Mu, Ilker Ender Ocak, Alex Yuandong Gu
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Patent number: 9945968Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g.Type: GrantFiled: June 3, 2014Date of Patent: April 17, 2018Assignees: PGS Geophysical AS, Agency for Science Technology and Research (A*STAR)Inventors: Ilker Ender Ocak, Chengliang Sun, Julius Ming-Lin Tsai, Sanchitha Nirodha Fernando
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Patent number: 9506946Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.Type: GrantFiled: June 3, 2014Date of Patent: November 29, 2016Assignees: PGS Geophysical AS, Agency for Science Technology and Research (A*STAR)Inventors: Ilker Ender Ocak, Chengliang Sun, Julius Ming-Lin Tsai, Sanchitha Nirodha Fernando
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Publication number: 20160202366Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g.Type: ApplicationFiled: June 3, 2014Publication date: July 14, 2016Applicants: PGS Geophysical AS, Agency for Science Technology and Research (A*STAR)Inventors: Ilker Ender Ocak, Chengliang Sun, Julius Ming-Lin Tsai, Sanchitha Nirodha Fernando
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Patent number: 9354283Abstract: According to embodiments of the present invention, a sensor is provided. The sensor includes a substrate, a beam suspended from the substrate, and a plurality of conductive lines arranged on the beam, wherein the beam is adapted to be displaced in response to a current flowing through the plurality of conductive lines, and a magnetic field interacting with the beam, and wherein the sensor is configured to determine a property of the magnetic field based on the displacement of the beam. According to further embodiments of the present invention, a method of controlling a sensor is also provided.Type: GrantFiled: November 5, 2013Date of Patent: May 31, 2016Assignee: Agency for Science, Technology and ResearchInventors: Ilker Ender Ocak, Julius Ming Lin Tsai
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Publication number: 20150293142Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.Type: ApplicationFiled: June 3, 2014Publication date: October 15, 2015Applicants: PGS Geophysical AS, Agency for Science Technology and Research (A*STAR)Inventors: Ilker Ender Ocak, Chengliang Sun, Julius Ming-Lin Tsai, Sanchitha Nirodha Fernando
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Publication number: 20140260617Abstract: A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.Type: ApplicationFiled: February 26, 2014Publication date: September 18, 2014Applicants: Agency for Science Technology and Research (A*STAR), PGS Geophysical ASInventors: Ilker Ender Ocak, Chengliang Sun, Julius Ming-Lin Tsai, Sanchitha Nirodha Fernando
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Publication number: 20140260618Abstract: A microelectromechanical system (MEMS) accelerometer having separate sense and force-feedback electrodes is disclosed. The use of separate electrodes may in some embodiments increase the dynamic range of such devices. Other possible advantages include, for example, better sensitivity, better noise suppression, and better signal-to-noise ratio. In one embodiment, the accelerometer includes three silicon wafers, fabricated with sensing electrodes forming capacitors in a fully differential capacitive architecture, and with separate force feedback electrodes forming capacitors for force feedback. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a restoring force to the proof mass region. MEMS accelerometers with force-feedback electrodes may be used in geophysical surveys, e.g.Type: ApplicationFiled: February 26, 2014Publication date: September 18, 2014Applicants: Agency for Science Technology and Research (A*STAR), PGS Geophysical ASInventors: Ilker Ender Ocak, Chengliang Sun, Julius Ming-Lin Tsai, Sanchitha Nirodha Fernando
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Publication number: 20140125325Abstract: According to embodiments of the present invention, a sensor is provided. The sensor includes a substrate, a beam suspended from the substrate, and a plurality of conductive lines arranged on the beam, wherein the beam is adapted to be displaced in response to a current flowing through the plurality of conductive lines, and a magnetic field interacting with the beam, and wherein the sensor is configured to determine a property of the magnetic field based on the displacement of the beam. According to further embodiments of the present invention, a method of controlling a sensor is also provided.Type: ApplicationFiled: November 5, 2013Publication date: May 8, 2014Applicant: Agency for Science, Technology and ResearchInventors: Ilker Ender Ocak, Julius Ming Lin Tsai
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Publication number: 20140042324Abstract: According to embodiments of the present invention, a detector is provided. The detector includes an electromagnetic absorber, an electromagnetic reflector arranged spaced apart from the electromagnetic absorber, wherein the electromagnetic absorber is configured to absorb an electromagnetic radiation, the electromagnetic radiation having a wavelength defined based on a distance between the electromagnetic absorber and the electromagnetic reflector, and an actuating element configured to move the electromagnetic absorber from an equilibrium position bi-directionally relative to the electromagnetic reflector to change the distance, and wherein the detector is configured to determine a change in a property associated with the electromagnetic absorber in response to the electromagnetic radiation. According to further embodiments of the present invention, a method of controlling the detector is also provided.Type: ApplicationFiled: August 7, 2013Publication date: February 13, 2014Applicant: Agency for Science, Technology and ResearchInventors: Piotr Kropelnicki, Ming Lin Julius Tsai, Ilker Ender Ocak, Andrew Randles