Abstract: A probe for measuring plasma parameters by means of active plasma resonance spectroscopy comprises an external coupling, a balun, an internal coupling, and a probe head. It is provided that the couplings, the balun, and the probe head are integrated in an electrically-insulating substrate cylinder, and the substrate cylinder has a layered structure made from multiple substrate layers along its rotational axis. In this way, a probe for measuring plasma parameters is provided which enables an improved measurement of the plasma parameters, wherein the plasma is influenced as little as possible during the measurement of the plasma parameters.

Abstract: A probe for measuring plasma parameters by means of active plasma resonance spectroscopy comprises an external coupling, a balun, an internal coupling, and a probe head. It is provided that the couplings, the balun, and the probe head are integrated in an electrically-insulating substrate cylinder, and the substrate cylinder has a layered structure made from multiple substrate layers along its rotational axis. In this way, a probe for measuring plasma parameters is provided which enables an improved measurement of the plasma parameters, wherein the plasma is influenced as little as possible during the measurement of the plasma parameters.

Abstract: The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.

Abstract: The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.

Abstract: A method for measuring the fill level of a medium in a container by applying the radar principle, whereby a measuring signal is generated and transmitted in the direction of the medium. A retroreflected portion of the measuring signal is captured and the fill level is determined as a function of the runtime of the measuring signal. The measuring signal is transmitted into multiple mutually different regions and the retroreflected portions of the measuring signal is received at multiple receiving points. In this fashion, it is possible to at least approximate the surface structure of the medium in the container.

Abstract: A process for measurement of the level of a medium in a container based on the radar principle in which a measurement signal is generated and emitted in the direction of the medium, the portion of the measurement signal which has been reflected back is detected and the level determined from the propagation time of the measurement signal. The portion of the measurement signal which has been reflected back is evaluated in a phase-sensitive manner in order to assign the respective level corresponding to the propagation time of the measurement signal to a specific direction of space. Thus, the level is determined even under difficult conditions, such as when structures or devices are present in the container or when loose bulk materials are present in loose bulk cones.

Abstract: A method for measuring the fill level of a medium in a container by applying the radar principle, whereby a measuring signal is generated and transmitted in the direction of the medium. A retroreflected portion of the measuring signal is captured and the fill level is determined as a function of the runtime of the measuring signal. The measuring signal is transmitted into multiple mutually different regions and the retroreflected portions of the measuring signal is received at multiple receiving points. In this fashion, it is possible to at least approximate the surface structure of the medium in the container.