Patents by Inventor Ilya MALAKHOVSKIY

Ilya MALAKHOVSKIY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation beam welding method, body and lithographic apparatus
    Patent number: 9409251
    Abstract: A method for radiation beam welding of a first member to a second member of a cooling body for an electromagnetic actuator. The first member on a side thereof comprises a surface portion provided with a recess, which is delimited by a periphery, and wherein the second member comprises a substantially continuous first surface portion complementary to the surface portion of the first member in order to close off the recess, the second member being provided with a second surface portion opposite to the first surface portion. The method comprising arranging the first and second member such that the first surface portion engages with the surface portion of the first member; providing a radiation beam, directing the radiation beam towards the second surface portion such that the first and second member are welded together at the periphery of the recess.
    Type: Grant
    Filed: September 11, 2012
    Date of Patent: August 9, 2016
    Assignee: ASML Netherlands B.V.
    Inventors: Petrus Mathijs Henricus Vosters, Mark Scholten, Ilya Malakhovskiy, Martinus Josephus Theodorus Maria Cortenbach
  • Radiation Beam Welding Method, Body and Lithographic Apparatus
    Publication number: 20130094897
    Abstract: A method for radiation beam welding of a first member to a second member of a cooling body for an electromagnetic actuator. The first member on a side thereof comprises a surface portion provided with a recess, which is delimited by a periphery, and wherein the second member comprises a substantially continuous first surface portion complementary to the surface portion of the first member in order to close off the recess, the second member being provided with a second surface portion opposite to the first surface portion. The method comprising arranging the first and second member such that the first surface portion engages with the surface portion of the first member; providing a radiation beam, directing the radiation beam towards the second surface portion such that the first and second member are welded together at the periphery of the recess.
    Type: Application
    Filed: September 11, 2012
    Publication date: April 18, 2013
    Applicant: ASML Netherlands B.V.
    Inventors: Petrus Mathijs Henricus VOSTERS, Mark SCHOLTEN, Ilya MALAKHOVSKIY, Martinus Josephus Theodorus Maria CORTENBACH