Patents by Inventor Ilya V. Bezel

Ilya V. Bezel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-wavelength pumping to sustain hot plasma
    Patent number: 8698399
    Abstract: A method of sustaining a plasma, by focusing a first wavelength of electromagnetic radiation into a gas within a volume, where the first wavelength is substantially absorbed by a first species of the gas and delivers energy into a first region of a plasma having a first size and a first temperature. A second wavelength of electromagnetic radiation is focused into the first region of the plasma, where the second wavelength is different than the first wavelength and is substantially absorbed by a second species of the gas and delivers energy into a second region of the plasma region within the first region of the plasma having a second size that is smaller than the first size and a second temperature that is greater than the first temperature.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: April 15, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya V. Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew W. Derstine, Richard W. Solarz
  • Multi-Wavelength Pumping to Sustain Hot Plasma
    Publication number: 20110291566
    Abstract: A method of sustaining a plasma, by focusing a first wavelength of electromagnetic radiation into a gas within a volume, where the first wavelength is substantially absorbed by a first species of the gas and delivers energy into a first region of a plasma having a first size and a first temperature. A second wavelength of electromagnetic radiation is focused into the first region of the plasma, where the second wavelength is different than the first wavelength and is substantially absorbed by a second species of the gas and delivers energy into a second region of the plasma region within the first region of the plasma having a second size that is smaller than the first size and a second temperature that is greater than the first temperature.
    Type: Application
    Filed: February 12, 2010
    Publication date: December 1, 2011
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Ilya V. Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew W. Derstine, Richard W. Solarz