Abstract: The disclosure describes devices and systems for a color-changing torque seal. A system includes multiple electrical connections. Each electrical connection of the multiple electrical connections includes a first electrical connector and a second electrical connector that contacts the first electrical connector. Each electrical connection further includes a color-changing torque seal disposed on the first electrical connector and the second electrical connector. The color-changing torque seal is configured to change color responsive to a temperature change of one or more of the first electrical connector or the second electrical connector.

Abstract: The disclosure describes devices and systems for a color-changing torque seal. A system includes multiple electrical connections. Each electrical connection of the multiple electrical connections includes a first electrical connector and a second electrical connector that contacts the first electrical connector. Each electrical connection further includes a color-changing torque seal disposed on the first electrical connector and the second electrical connector. The color-changing torque seal is configured to change color responsive to a temperature change of one or more of the first electrical connector or the second electrical connector.

Abstract: The present invention provides methods and apparatus for processing semiconductor substrates. Particularly, the present invention provides a modular processing cell to be used in a cluster tool. The modular semiconductor processing cell of the present invention comprises a chamber having an inject cap, a gas panel module configured to supply one or more processing gas to the chamber through the inject cap, wherein the gas panel module is position adjacent the inject cap. The processing cell further comprises a lamp module positioned below the chamber. The lamp module comprises a plurality of vertically oriented lamps.