Patents by Inventor Imre Rudolf Richard DEHNER

Imre Rudolf Richard DEHNER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT
    Publication number: 20240337956
    Abstract: An apparatus for cleaning a component for use in a lithographic apparatus, the apparatus including at least one cleaning module or a plurality of cleaning modules, wherein the at least one cleaning module or the plurality of cleaning modules include a plurality of cleaning mechanisms, and wherein the plurality of cleaning mechanisms include: at least one preparing mechanism for reducing adhesion of the particles to the component and at least one removing mechanism for removing particles from the component, or a plurality of removing mechanisms for removing particles from the component.
    Type: Application
    Filed: July 8, 2022
    Publication date: October 10, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Lucas Christiaan Johan HEIJMANS, Imre Rudolf Richard DEHNER, Raymond Wilhelmus Louis LAFARRE, Cornelis Christiaan OTTENS, Marcus Adrianus VAN DE KERKHOF, Andrey NIKIPELOV, Dennis VANOTTERDIJK, Edwin Johannes Theodorus SMULDERS, Andrei Mikhailovich YAKUNIN, Guido SALMASO, Luc VOORDECKERS, Chaitanya Krishna ANDE, Martinus Jacobus Johannes COENEN