Patents by Inventor IMT CO., LTD.

IMT CO., LTD. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LARGE-AREA MASK CLEANING APPARATUS USING LASER AND LARGE-AREA MASK CLEANING SYSTEM INCLUDING THE SAME
    Publication number: 20130126490
    Abstract: A laser cleaning apparatus for removing a surface pollutant on a large-area mask uniformly over an entire surface thereof is disclosed. The laser cleaning apparatus includes a laser generator; and a laser scanner for receiving a laser beam from the laser generator and scanning a surface of the mask with the laser beam using a movable end scanning mirror. The laser scanner includes a distance compensation device for maintaining a constant transmission distance of the laser beam between the lager generator and the surface of the mask.
    Type: Application
    Filed: November 7, 2012
    Publication date: May 23, 2013
    Applicant: IMT CO., LTD.
    Inventor: IMT CO., LTD.