Patents by Inventor In Ahn

In Ahn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250018526
    Abstract: The embodiments relate to a polishing pad for use in a chemical mechanical planarization (CMP) process of semiconductors, to a process for preparing the same, and to a process for preparing a semiconductor device using the same. The polishing pad according to the embodiment adjusts the surface roughness characteristics of the polishing pad after polishing, whereby the polishing rate can be enhanced, and the surface residues, surface scratches, and chatter marks of the wafer can be remarkably reduced.
    Type: Application
    Filed: July 25, 2024
    Publication date: January 16, 2025
    Inventors: Jae In AHN, Kyung Hwan KIM, Sung Hoon YUN, Jang Won SEO, Kang Sik MYUNG
  • Patent number: 12162114
    Abstract: The present disclosure relates to a polishing pad, a method of manufacturing the polishing pad, and a method of manufacturing a semiconductor device using the same. In the polishing pad, an unexpanded solid-phase blowing agent is included in a polishing composition when a polishing layer is manufactured, and the unexpanded solid-phase blowing agent is expanded during a curing process to form a plurality of uniform pores in the polishing layer, such that defects occurring on a surface of the semiconductor substrate may be prevented. In addition, the present disclosure may provide a method of manufacturing a semiconductor device to which the polishing pad is applied.
    Type: Grant
    Filed: September 29, 2021
    Date of Patent: December 10, 2024
    Assignee: SK ENPULSE CO., LTD.
    Inventors: Jong Wook Yun, Jae In Ahn, Eun Sun Joeng, Hye Young Heo, Jang Won Seo
  • Patent number: 12138738
    Abstract: The embodiments relate to a polishing pad for use in a chemical mechanical planarization (CMP) process of semiconductors, to a process for preparing the same, and to a process for preparing a semiconductor device using the same. The polishing pad according to the embodiment adjusts the surface roughness characteristics of the polishing pad after polishing, whereby the polishing rate can be enhanced, and the surface residues, surface scratches, and chatter marks of the wafer can be remarkably reduced.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: November 12, 2024
    Assignee: SK ENPULSE CO., LTD.
    Inventors: Jae In Ahn, Kyung Hwan Kim, Sung Hoon Yun, Jang Won Seo, Kang Sik Myung
  • Patent number: 12138736
    Abstract: A polishing pad sheet which provides optimized interfacial properties for the laminated structure of a polishing pad based on appropriate elasticity and high durability, and in which the polishing pad having the polishing pad sheet applied thereto not only has its intrinsic function such as the polishing rate or the like, but also is capable of realizing the function without damage even during the polishing process in a wet environment for a long time, and a polishing pad to which the polishing pad sheet is applied. The polishing pad sheet includes: a first surface which is a polishing layer attachment surface; and a second surface which is a rear surface of the first surface, wherein the first surface has a value of the following Equation 1 of 4.20 to 5.50:4.20?(|Sv|)/Sz×P (%)?5.50.
    Type: Grant
    Filed: December 7, 2021
    Date of Patent: November 12, 2024
    Assignee: SK ENPULSE CO., LTD.
    Inventors: Sung Hoon Yun, Kyung Hwan Kim, Jae In Ahn, Jang Won Seo
  • Patent number: 12058881
    Abstract: A display device includes: a window; a display panel disposed on a rear surface of the window; an adhesive layer disposed between the window and the display panel and attaching the display panel to the window; and a protruding structure that protrudes from the rear surface of the window and includes a first surface facing the adhesive layer.
    Type: Grant
    Filed: May 12, 2021
    Date of Patent: August 6, 2024
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Dong Hyeon Lee, Jong In Ahn, Chang Moo Lee
  • Patent number: 12042900
    Abstract: The present disclosure relates to a polishing system in which accuracy and easiness of attachment and detachment of a polishing pad to a surface plate are maximized, the polishing system including: a surface plate having a polishing pad mounted on an upper portion; and the polishing pad mounted on the surface plate, in which the polishing pad includes: a polishing surface and a surface plate attachment surface that is a rear surface of the polishing surface, the surface plate attachment surface includes: at least one engraved portion, the surface plate includes at least one embossed portion, and the embossed portion and the engraved portion have a complementary coupling structure, and a method of manufacturing a semiconductor device to which the polishing system is applied.
    Type: Grant
    Filed: May 25, 2022
    Date of Patent: July 23, 2024
    Assignee: SK ENPULSE CO., LTD.
    Inventors: Jae In Ahn, Kyung Hwan Kim, Kang Sik F Myung, Jang Won Seo
  • Patent number: 11951591
    Abstract: The present disclosure provides a polishing pad, which may maintain polishing performances required for a polishing process, such as a removal rate and a polishing profile, minimize defects that may occur on a wafer during the polishing process, and polish layers of different materials so as to have the same level of flatness even when the layers are polished at the same time, and a method for producing the polishing pad. In addition, according to the present disclosure, it is possible to determine a polishing pad, which shows an optimal removal rate selectivity along with excellent performance in a CMP process, through the physical property values of the polishing pad without a direct polishing test.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: April 9, 2024
    Assignee: SK ENPULSE CO., LTD.
    Inventors: Hye Young Heo, Jang Won Seo, Jae In Ahn, Jong Wook Yun
  • Patent number: 11872531
    Abstract: The present disclosure provides a fluorine-based resin porous membrane exhibiting high mechanical strength and low heat shrinkage rate while having a fine pore size, and a method for preparing the same.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: January 16, 2024
    Assignee: LG CHEM, LTD.
    Inventors: Sungjae Han, Joo Yeon Seo, Byeong In Ahn
  • Publication number: 20230322856
    Abstract: The present invention relates to Regentide-012 and Regentide-013 and, more specifically, to a use of Regentide-012 and Regentide-013 for improving skin conditions. Regentide-012 and Regentide-013 according to the present invention is free of cytotoxicity and have remarkable effects of skin aging reduction, skin regeneration, skin elasticity improvement, skin wrinkle prevention, skin wrinkle reduction, and skin wound recovery and as such, can be variously utilized in the pharmaceutical, medicinal, cosmetic, and food fields.
    Type: Application
    Filed: June 8, 2021
    Publication date: October 12, 2023
    Inventors: Jae Hwan KIM, Ji Heon RHIM, Ri Ra LEE, Hye In AHN, Hae Yeong KANG, Ga Hyun KIM
  • Patent number: 11759909
    Abstract: The embodiments relate to a polishing pad for use in a chemical mechanical planarization (CMP) process of semiconductors, to a process for preparing the same, and to a process for preparing a semiconductor device using the same. The polishing pad according to the embodiment adjusts the surface roughness characteristics of the polishing pad after polishing, whereby the polishing rate can be enhanced, and the surface residues, surface scratches, and chatter marks of the wafer can be remarkably reduced.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: September 19, 2023
    Assignee: SK ENPULSE CO., LTD.
    Inventors: Jae In Ahn, Kyung Hwan Kim, Sung Hoon Yun, Jang Won Seo, Kang Sik Myung
  • Publication number: 20230220006
    Abstract: The present invention relates to regentide-034 and, more specifically, to a use of regentide-034 for improving the condition of the skin. Regentide-034 according to the present invention is noncytotoxic and has remarkable effects of skin aging alleviation, skin regeneration, skin elasticity improvement, skin wrinkle prevention, skin wrinkle reduction and skin wound regeneration, and thus can be variously used in the fields of pharmacology, medicine, cosmetics, and food.
    Type: Application
    Filed: June 8, 2021
    Publication date: July 13, 2023
    Inventors: Jae Hwan KIM, Ji Heon RHIM, Ri Ra LEE, Hye In AHN, Hae Yeong KANG
  • Publication number: 20230210748
    Abstract: The present invention relates to Regentide-034 and Regentide-041 and, more specifically, to a use of a mixture of Regentide-034 and Regentide-041 for improving skin conditions. A mixture of Regentide-034 and Regentide-041 according to the present invention is free of cytotoxicity and has remarkable effects of promoting cell proliferation and collagen synthesis, inhibiting elastase activity, and suppressing ultraviolet light-induced cell death and as such, can be variously utilized in the pharmaceutical, medicinal, cosmetic, and food fields.
    Type: Application
    Filed: June 8, 2021
    Publication date: July 6, 2023
    Inventors: Jae Hwan KIM, Ji Heon RHIM, Ri Ra LEE, Hye In AHN
  • Publication number: 20230159590
    Abstract: The present invention relates to Regentide-041 and, more specifically, to a use of Regentide-041 for improving skin conditions. Regentide-041 according to the present invention is free of cytotoxicity and has remarkable effects of skin aging reduction, skin regeneration, skin elasticity improvement, skin wrinkle prevention, skin wrinkle reduction, and skin wound recovery and as such, can be variously utilized in the pharmaceutical, medicinal, cosmetic, and food fields.
    Type: Application
    Filed: June 8, 2021
    Publication date: May 25, 2023
    Inventors: Jae Hwan KIM, Ji Heon RHIM, Hye In AHN, Ri Ra LEE, Hae Yeong KANG
  • Patent number: 11654403
    Abstract: The present disclosure relates to a porous fluorine-based resin composite membrane having excellent water repellency and oil repellency, and a method for producing the same.
    Type: Grant
    Filed: July 9, 2019
    Date of Patent: May 23, 2023
    Assignee: LG CHEM, LTD.
    Inventors: Sin Woo Kim, Seijung Park, Byeong In Ahn, Hyun Seong Ko
  • Publication number: 20230111352
    Abstract: The present disclosure is to provide a polishing pad which is capable of providing physical properties corresponding to various polishing purposes for various polishing objects through the subdivided structural design in a thickness direction, and of securing environmental friendliness by applying a recycled or recyclable material to at least some components, in relation to disposal after use, unlike the conventional polishing pad. Specifically, the polishing pad includes a polishing layer, wherein the polishing layer includes a polishing variable layer having a polishing surface; and a polishing constant layer disposed on a rear surface side of the polishing variable layer opposite to the polishing surface, and wherein the polishing constant layer includes a cured product of a composition having thermosetting polyurethane particles and a binder.
    Type: Application
    Filed: October 11, 2022
    Publication date: April 13, 2023
    Inventors: Jang Won SEO, Sung Hoon YUN, Eun Sun JOENG, Jae In AHN
  • Publication number: 20230059394
    Abstract: Provided are a polishing pad provided with a structural feature capable of maximizing the leakage prevention effect, the polishing pad including: a polishing layer including a first surface which is a polished surface and a second surface which is an opposite surface thereof, and including a first through hole passing through the first surface and the second surface; a window disposed in the first through hole; and a support layer disposed at the second surface of the polishing layer.
    Type: Application
    Filed: July 1, 2022
    Publication date: February 23, 2023
    Inventors: Sung Hoon YUN, Jang Won SEO, Hye Young HEO, Jong Wook YUN, Jae In AHN
  • Publication number: 20230047113
    Abstract: Provided are a polishing device including: a surface plate; a polishing pad mounted on the surface plate; a carrier for accommodating a polishing object; and a slurry supply unit including at least one nozzle, wherein the carrier performs a vibrating motion in a trajectory from the center of the surface plate to the end of the surface plate, and the slurry supply unit performs a vibrating motion at the same trajectory and speed as those of the vibrating motion of the carrier, as a polishing device which includes a slurry supply unit enabling subdivided driving in the supply of a polishing slurry, and in which the driving of the slurry supply unit has an advantage enabling optimized driving in an organic relationship between rotation and/or vibrating motion of the carrier and the surface plate and vertical pressurization conditions, etc. for the polishing surface of the carrier.
    Type: Application
    Filed: August 12, 2022
    Publication date: February 16, 2023
    Inventors: Jae In AHN, Jong Wook YUN, Eun Sun JOENG, Jang Won SEO
  • Publication number: 20230052322
    Abstract: The present disclosure is intended to provide, as a polishing pad to which a window for an endpoint detection is applied, and in which the window is capable of providing improved polishing performance in terms of preventing defects, etc., by a specific structure due to the window, rather than negatively affecting polishing performance as a local heterogeneous component on the polishing pad, a polishing pad including: a polishing layer including a first surface that is a polishing surface and a second surface that is a rear surface thereof, and containing a first through-hole penetrating from the first surface to the second surface; a window disposed in the first through-hole; and a void between a side surface of the first through-hole and a side surface of the window, and a method for manufacturing a semiconductor device by applying the same.
    Type: Application
    Filed: July 27, 2022
    Publication date: February 16, 2023
    Inventors: Sung Hoon YUN, Jae In Ahn, Kyung Hwan Kim, Jang Won Seo
  • Publication number: 20220379427
    Abstract: The present disclosure relates to a polishing system in which accuracy and easiness of attachment and detachment of a polishing pad to a surface plate are maximized, the polishing system including: a surface plate having a polishing pad mounted on an upper portion; and the polishing pad mounted on the surface plate, in which the polishing pad includes: a polishing surface and a surface plate attachment surface that is a rear surface of the polishing surface, the surface plate attachment surface includes: at least one engraved portion, the surface plate includes at least one embossed portion, and the embossed portion and the engraved portion have a complementary coupling structure, and a method of manufacturing a semiconductor device to which the polishing system is applied.
    Type: Application
    Filed: May 25, 2022
    Publication date: December 1, 2022
    Inventors: Jae In AHN, Kyung Hwan Kim, Seong Hwan Ma, Jang Won Seo
  • Publication number: 20220371155
    Abstract: The present disclosure relates to a polishing pad, a method for manufacturing the polishing pad, and a method for manufacturing a semiconductor device using the polishing pad, and the present disclosure can prevent an error in detecting the end point due to the window in the polishing pad by minimizing the effect on transmittance according to the surface roughness of the window in the polishing pad in the polishing process, and allows the fluidity and loading rate of the polishing slurry in the polishing process to be implemented at similar levels by maintaining the surface roughness difference between the polishing layer and the window in the polishing pad within the predetermined range, thereby enabling the problem of deterioration of polishing performance due to the surface difference between the polishing layer and the window to be prevented. Further, a method for manufacturing a semiconductor device to which a polishing pad is applied may be provided.
    Type: Application
    Filed: May 3, 2022
    Publication date: November 24, 2022
    Inventors: Sung Hoon YUN, Jae In AHN, Eun Sun Joeng, Jang Won Seo